Vacuum apparatus, substrate alignment apparatus, and method of forming pre-bonded wafer
A technology for aligning equipment and substrates, used in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as difficult implementation and complex sealing modules, and achieve the effect of improving bonding accuracy
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[0061] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar extensions without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.
[0062] In the following, specific embodiments of the present invention will be described in conjunction with the accompanying drawings. see Figure 1-6 As shown, the present invention provides a vacuum device, a substrate alignment device and a method for forming a pre-bonded wafer.
[0063] figure 2 A schematic diagram is shown when a substrate alignment device including a vacuum device transports a substrate according to an embodiment of the present invention. The vacuum device includes: an upper fixing module, a lower fi...
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