Vacuum device

Abstract

The invention discloses a vacuum device which comprises a first chamber and a second chamber; the first chamber is provided with a first channel port; the second chamber is provided with a second channel port, and a third chamber which is in sealing connection with the first chamber and the second chamber correspondingly; the first channel port and the second channel port communicate with the third chamber correspondingly; a sealing door assembly is arranged in the third chamber; the sealing door assembly comprises a lifting mechanism, a first door body and a second door body; the lifting mechanism can lift in the third chamber; the first door body is arranged on the lifting mechanism and can seal the first channel port; the second door body is arranged on the lifting mechanism and can seal the second channel port; and the first door body is controlled to seal the first channel port and / or the second door body is controlled to seal the second channel port synchronously. With the implementation of the vacuum device, the corresponding chambers can be sealed correspondingly without affecting the vacuum states of the chambers, and the operation effect of the vacuum device can be improved. The vacuum device is simplified in structure and is easy to repair and maintain.

Description

technical field [0001] The invention relates to the field of display panel manufacture, in particular to a vacuum device used in the manufacture of display panels. Background technique [0002] Due to the unreasonable structural design of the vacuum equipment used for driving glass substrates in the prior art, there are mainly the following defects: [0003] 1. The seal is installed on the inner wall of the chamber on both sides of the channel opening. When replacing it, the corresponding chamber needs to be vacuum-broken, which affects the operation effect of the whole machine; at the same time, the operator needs to work inside the chamber , the efficiency is low; [0004] 2. When cleaning and maintaining a chamber with a sealed door, it is necessary to break the vacuum of the corresponding chamber at the same time, and the operator needs to work in a narrow space with a sealed door chamber, which is inefficient. [0005] 3. When the vacuum device is powered off or the C...

AI Technical Summary

Problems solved by technology

[0003] 1. The seal is installed on the inner wall of the chamber on both sides of the channel opening. When replacing it, the corresponding chamber needs to be vacuum-broken, which affects the operation effect of the whole machine; at the same time, the operator needs to work inside the chamber , the efficiency is low;

[0004] 2. When cleaning and maintaining a chamber with a sealed door, it is necessary to break the vacuum of the corresponding chamber at the same time, and the operator needs to work in a narrow space with a sealed door chamber, which is inefficient

[0005] 3. When the vacuum device is powered off or the CDA is cut off for a long time, the vacuum pump and the lifting cylinder cannot work, and the airtight door will open due to the falling of its own weight, causing the corresponding chamber to break the vacuum and reduce the recovery efficiency.

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