Method for determining uncertainty of flatness measurement result of flat plate under on-site environment
A technology of field environment and measurement results, applied in the field of inspection
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[0081] The invention provides a method for determining the uncertainty of the flatness measurement result of a flat panel in an on-site environment. The method comprises the following steps:
[0082] 1) Determine the level of the plate placed in the X and Y directions, determine the jump of the detection equipment value due to the vibration of the surrounding environment, and determine whether the composite uncertainty includes the uncertainty component caused by the level of the plate and the surrounding vibration according to the measurement results .
[0083] 2) Determine the uncertainty component calculation formula caused by the system effect to calculate the B-type uncertainty component of the flatness measurement result of the plate to be tested in the field environment where μ z Uncertainty component introduced for environmental vibration, μ Sp Uncertainty component introduced for the horizontal case, μ Sb Uncertainty component introduced by the measuring device, μ...
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