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Time-grating linear displacement sensor

A linear displacement and sensor technology, used in instruments, measuring devices, electrical devices, etc., can solve the problems of prone to cumulative error, unable to achieve incremental linear displacement and absolute linear displacement measurement, etc.

Active Publication Date: 2018-07-10
重庆大族时栅科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing types of inductive time grating linear displacement sensors can only measure incremental linear displacement (ie relative displacement), or can only measure absolute linear displacement, and cannot simultaneously measure incremental linear displacement and absolute linear displacement. measurement of displacement, and is prone to cumulative errors

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] like Figure 1 to Figure 5 The time grating linear displacement sensor shown includes a fixed scale 1 and a moving scale 2, and the moving scale 2 is directly opposite to the fixed scale 1 in parallel with a gap of 0.1 mm. The fixed scale 1 is composed of a magnetically conductive fixed scale base 11 and an excitation unit arranged on the upper surface of the fixed scale base 11 , and the moving scale 2 is composed of a magnetically conductive movable scale base 21 and an induction unit arranged on the lower surface of the movable scale base 21 .

[0032] Take the X-axis as the measuring direction, the Y-axis as the front-back direction, and the Z-axis as the up-down direction.

[0033] The excitation unit includes a first group of excitation coils 12 and a second group of excitation coils 13 arranged in different wiring layers insulated from each other, the first group of excitation coils 12 is located above the second group of excitation coils 13, and the second group...

Embodiment 2

[0052] Embodiment 2: Most of the structure of the time grating linear displacement sensor in this embodiment is the same as Embodiment 1, the difference is:

[0053] The first group of excitation coils 12 is located below the second group of excitation coils 13 , and the second induction coil 23 is located below the first induction coil 22 . The first forward sine excitation coil unit 121 and the first forward cosine excitation coil unit 122 in the first group of excitation coils 12 have the same structure, and are all composed of two first forward parallelogram helical coils in series with the same size. The first forward parallelogram helical coil is directly opposite, and is respectively arranged in two mutually insulated wiring layers, and is connected through a central via. The number of turns of the first forward parallelogram helical coil is 2 turns; the first group of exciting coils The first reverse sine excitation coil unit 123 and the first reverse cosine excitation...

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Abstract

The invention discloses a time-grating linear displacement sensor, and the displacement sensor comprises a fixed ruler which consists of a fixed ruler base body and an excitation unit, and also comprises a moving ruler which consists of a moving ruler base body and an induction unit. The excitation unit comprises a magnet exciting coil and a second magnet exciting coil, which respectively form aninclined angle alpha and an inclined angle beta with the positive direction of the X-axis. The induction unit exactly faces an overlapped part of the first and second magnet exciting coils, and the induction unit comprises a first induction coil and a second induction coil. The first induction coil is formed by the series connection of two first parallelogram coils, and the long and short sides ofthe first parallelogram coils respectively form inclined angle beta and an inclined angle alpha with the positive direction of the X-axis. The second induction coil is formed by the series connectionof two second parallelogram coils, and the long and short sides of the second parallelogram coils respectively form inclined angle beta and an inclined angle alpha with the positive direction of theX-axis. The lengths of the long side and short sides of the first and second parallelogram coils meet a certain relation. The sensor can achieve the measurement of the incremental and absolute lineardisplacement under the condition that the high resolution is guaranteed.

Description

technical field [0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a time grating linear displacement sensor. Background technique [0002] Absolute linear displacement sensors are more and more used in industrial production because they can obtain the current absolute position when they are powered on, and can eliminate cumulative errors during the measurement process. Absolute linear displacement sensors widely used at present, such as gratings, capacitive grids, magnetic grids, etc., install two grid code tracks (absolute and incremental) in parallel, add single-pole or absolute codes within the measurement range, and then Use two reading heads to read independent displacement information respectively, and obtain absolute displacement value after processing. The common feature of these absolute linear displacement sensors is to use the space ultra-precise marking of the grid lines to meet the resolution requ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
Inventor 武亮汤其富徐是王阳阳陈锡侯徐清华
Owner 重庆大族时栅科技有限公司