Time-grating linear displacement sensor
A linear displacement and sensor technology, used in instruments, measuring devices, electrical devices, etc., can solve the problems of prone to cumulative error, unable to achieve incremental linear displacement and absolute linear displacement measurement, etc.
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Embodiment 1
[0031] like Figure 1 to Figure 5 The time grating linear displacement sensor shown includes a fixed scale 1 and a moving scale 2, and the moving scale 2 is directly opposite to the fixed scale 1 in parallel with a gap of 0.1 mm. The fixed scale 1 is composed of a magnetically conductive fixed scale base 11 and an excitation unit arranged on the upper surface of the fixed scale base 11 , and the moving scale 2 is composed of a magnetically conductive movable scale base 21 and an induction unit arranged on the lower surface of the movable scale base 21 .
[0032] Take the X-axis as the measuring direction, the Y-axis as the front-back direction, and the Z-axis as the up-down direction.
[0033] The excitation unit includes a first group of excitation coils 12 and a second group of excitation coils 13 arranged in different wiring layers insulated from each other, the first group of excitation coils 12 is located above the second group of excitation coils 13, and the second group...
Embodiment 2
[0052] Embodiment 2: Most of the structure of the time grating linear displacement sensor in this embodiment is the same as Embodiment 1, the difference is:
[0053] The first group of excitation coils 12 is located below the second group of excitation coils 13 , and the second induction coil 23 is located below the first induction coil 22 . The first forward sine excitation coil unit 121 and the first forward cosine excitation coil unit 122 in the first group of excitation coils 12 have the same structure, and are all composed of two first forward parallelogram helical coils in series with the same size. The first forward parallelogram helical coil is directly opposite, and is respectively arranged in two mutually insulated wiring layers, and is connected through a central via. The number of turns of the first forward parallelogram helical coil is 2 turns; the first group of exciting coils The first reverse sine excitation coil unit 123 and the first reverse cosine excitation...
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