X-ray zone plate manufacturing system

Abstract

The invention relates to an X-ray zone plate manufacturing system. The X-ray zone plate manufacturing system comprises a chamber, a first precursor charging pipeline, a second precursor charging pipeline, a clamp, a muffle furnace, an air sucking pipeline and a vacuum pump, wherein the first precursor charging pipeline communicates with one end of the chamber and is used for conveying a first precursor into the chamber; the second precursor charging pipeline communicates with one end of the chamber and is used for conveying a second precursor into the chamber; the clamp is arranged inside thechamber and is used for fixing columnar thin-filament-shaped linings; the chamber is coated with the muffle furnace; the muffle furnace is used for heating the chamber; one end of the air sucking pipeline communicates with the other end of the chamber; and the vacuum pump is connected with the other end of the air sucking pipeline and is used for vacuumizing the chamber via the air sucking pipeline. The X-ray zone plate manufacturing system provided by the invention can realize simultaneous alternating growing of two types of zone plates on a plurality of columnar thin-filament-shaped liningsand improves the machining efficiency of the zone plates.

Description

technical field [0001] The invention relates to the technical field of atomic layer deposition, in particular to an X-ray zone plate preparation system. Background technique [0002] Atomic layer deposition (ALD) is a thin film preparation technology that can achieve monoatomic layer growth. Its self-limitation and complementarity enable this technology to have excellent control over the composition and thickness of the film, and the prepared thin film has good shape retention. , high purity and uniformity, has been widely used in various fields. [0003] At present, the preparation of X-ray zone plates by atomic layer deposition technology is an effective method to improve the resolution and diffraction efficiency of X-ray zone plates. X-ray zone plate is an optical element in the X-ray band, which has the functions of dispersion, focusing and imaging of X-rays. The traditional preparation methods mainly include laser holography, electron beam lithography, sputtering secti...

AI Technical Summary

Problems solved by technology

This traditional ALD equipment chamber can only heat sheet-like substrates. When the target substrate is in the shape of filaments, this ALD equip

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