Integrated assembly-free multilayer microgear structure used for MEMS micro-nano machining

Abstract

The invention discloses an integrated assembly-free multilayer microgear structure used for MEMS micro-nano machining. The integrated assembly-free multilayer microgear structure comprises a rooting bearing, a first step-like gear locating structure, a second step-like gear locating structure and multiple gear layers. The lower end face of the rooting bearing is fixedly connected to a gear base. The second step-like gear locating structure is arranged at the lower end of the rooting bearing. The second step-like gear locating structure is fixedly connected to the gear base. The first step-likegear locating structure is arranged at the upper end of the rooting bearing. The middle portion of the rooting bearing is sleeved with the multiple gear layers. The multilayer microgear structure isan integrated structure. The assembly precision consistency of the multilayer microgear structure is better. The integrated assembly-free multilayer microgear structure is more suitable for batch production. The connecting strength of the gear structure is higher.

Description

technical field [0001] The invention relates to the technical field of micro-gears, in particular to an integrated non-assembly multi-layer micro-gear structure applied to MEMS micro-nano processing. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) has become a hotspot in industrial and academic research, and it is of great significance to the development of industry. A gear is a mechanical element with teeth on the rim that can continuously mesh to transmit motion and power. The role of the gear is to transmit the rotation of one shaft to another, so as to achieve the purposes of deceleration, speed up, direction change and reversing. It is an important mechanical basic part and is widely used. [0003] With the development of MEMS technology and the urgent need of integrated microsystems, the trend of miniaturization of mechanical structures is becoming more and more obvious. Gears, transmissions, and driving components are currently facing the need ...

AI Technical Summary

Problems solved by technology

[0004] However, at present, the gear structure processed by the traditional processing methods of machine tools and cutting tools is directly applied to the field of MEMS micro-nano machining micro-gears. The micro-gears are assembled by shaft hole assembly, which cannot be processed into integrated micro-gears without assembly. The problem of mass production and assembly precision consistency cannot be guaranteed

The metal micromachining method in the MEMS micro-nano processing technology is generally prepared by the method of additive manufacturing. The metal additive manufacturing method is generally electroplating, sputtering, etc. The metal materials produced by these methods are different from the bulk metal materials in the material-induced Density, material strength and other metal quality are very different, and the gear structure is prone to failure

Images