Oxygen concentration detection sensor for oxygenerator

Abstract

The invention provides an oxygen concentration detection sensor for an oxygenator. The oxygen concentration detection sensor comprises an oxygen permeation layer, an insulating layer arranged on the lower surface of the oxygen permeation layer, a heater layer arranged on the lower surface of the insulating layer, a cavity arranged between the oxygen permeation layer and the insulating layer, and adiffusion barrier channel layer arranged between the oxygen permeation layer and the insulating layer, wherein an outer electrode and an outer electrode pin are arranged above the oxygen permeation layer; an inner electrode and an inner electrode pin are arranged below the oxygen permeation layer; the outer electrode and the inner electrode oppositely form an oxygen pumping counter electrode; a heater is arranged in the heater layer, and the heater is provided with a terminal pin; the inner electrode is arranged in the cavity; one end of the diffusion barrier channel layer communicates with external atmosphere to be detected, and the other end of the diffusion barrier channel layer communicates with the cavity. The oxygen concentration detection sensor is simple in structure, shortens thestarting time through a built-in heating circuit manner, and comprehensively utilizes the oxygen permeation characteristic, high temperature resistance and corrosion resistance of a ceramic substrate; the detection of oxygen concentration is not affected by environmental factors, such as the temperature and flow of gas to be detected.

Description

technical field [0001] The invention relates to a high oxygen concentration detection sensor, in particular to an oxygen concentration detection sensor for an oxygen generator. Background technique [0002] The existing oxygen concentration detection sensors for oxygen generators mainly include ultrasonic sensors, zirconia-based sensors and electrochemical sensors. Among them, the ultrasonic oxygen sensor can only detect the gas oxygen concentration of binary components, and the upper limit of oxygen concentration detection is Only 95%, and it is greatly affected by the humidity and temperature of the detected gas; the electrochemical oxygen sensor needs frequent calibration and is easily affected by the temperature of the detected gas, and its service life is relatively short; the existing zirconia-based oxygen sensor is easily affected by the gas flow , requires sampling and detection, cannot directly detect the oxygen concentration in the gas to be measured, and uses elec...

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Problems solved by technology

[0002] The existing oxygen concentration detection sensors for oxygen generators mainly include ultrasonic sensors, zirconia-based sensors and electrochemical sensors. Among them, the ultrasonic oxygen sensor can only detect the gas oxygen concentration of binary components, and the upper limit of oxygen concentration detection is Only 95%, and it is greatly affected by the humidity and temperature of the detected gas; the electrochemical oxygen sensor needs frequent calibration and is easily affected by the temperature of the detected gas, and its service life is relatively short; the existing zirconia-based oxygen sensor is easily affected by the gas flow , need sampling detection, can not directly detect the oxygen concentration in the measured gas, and use electric furnace wire heating life is limited, and this type of sensor can not be completely continuous monitoring, through bypass shunt, pulse monitoring

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