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an image sensor

An image sensor and sensor technology, which is applied in the field of exposure detection, can solve problems such as uneven backscattering in the photodiode array area, image sensors are easily blocked by objects to be measured, and unstable detection capabilities, so as to improve sensitivity and light utilization. , the effect of increasing the detection area

Active Publication Date: 2020-11-20
IRAY IMAGE TECH TAICANG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide an image sensor, which is used to solve the problem that the existing image sensor is easily blocked by the object to be measured, the detection ability is unstable, and the backscattering of the photodiode array area of ​​the image sensor is not good. Uniformity, a problem that affects image quality

Method used

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Experimental program
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Embodiment 1

[0041] Such as image 3 As shown, this embodiment provides an image sensor, and the image sensor includes:

[0042] An array structure 1, the array structure 1 comprising a substrate, and an image sensor array located above the substrate;

[0043] a scintillator 2 located above the array structure 1;

[0044] A reflective layer 5 surrounding the array structure 1, wherein the reflective layer 5 is provided with at least one opening exposing the array structure 1;

[0045] an exposure detection structure 4 located at said opening; and

[0046] The backscattering layer 3 located below the reflective layer 5 .

[0047] Specifically, the substrate is a uniform transparent substrate, including one of sapphire or fused silica.

[0048] Specifically, the scintillator 2 is formed of a material with relatively high reflectivity; preferably, in this embodiment, the scintillator 2 includes gadolinium oxysulfide (GOS) or cesium iodide (CsI); of course, in In other embodiments, the sc...

Embodiment 2

[0061] like Figure 4 As shown, the difference between the image sensor of this embodiment and the image sensor described in Embodiment 1 is that the position of the opening on the reflective layer 5 and the position of the exposure detection structure 4 are different; the reflection path of visible light in the array structure 1 described in this embodiment like Figure 4 As shown, specifically, the visible light is captured by the exposure sensor through the optical adhesive layer 42 after multiple reflections, thereby realizing the exposure detection of the image sensor.

Embodiment 3

[0063] like Figure 5 As shown, the difference between the image sensor of this embodiment and the image sensor described in Embodiments 1 and 2 is that the position of the opening on the reflective layer 5 and the position of the exposure detection structure 4 are different; The reflection path of Figure 5 As shown, specifically, the visible light is captured by the exposure sensor through the optical adhesive layer 42 after multiple reflections, thereby realizing the exposure detection of the image sensor.

[0064] In summary, the image sensor of the present invention has the following beneficial effects:

[0065] 1. The image sensor of the present invention uses a scintillator and a reflective layer to construct the array structure into a light guide plate with better light guiding properties, which can guide the visible light generated by X-ray exposure at any position to the opening of the reflective layer, The influence of the image sensor being blocked by the shootin...

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Abstract

The present invention provides an image sensor, the image sensor includes: an array structure, the array structure includes a substrate, and an image sensor array located above the substrate; a scintillator located above the array structure; surrounding the array structure A reflective layer, wherein the reflective layer is provided with at least one opening exposing the array structure; an exposure detection structure located at the opening; and a backscattering layer located under the reflective layer. The image sensor provided by the invention solves the problems that the existing image sensor is easily blocked by the object to be measured, the detection ability is unstable, and the backscattering of the photodiode array area of ​​the image sensor is uneven, which affects the image quality.

Description

technical field [0001] The invention relates to the field of exposure detection, in particular to an image sensor. Background technique [0002] Indirect detection detectors represented by amorphous silicon X-ray detectors all need a layer of scintillator in front of photosensitive elements such as photodiode arrays to convert X-rays into visible light, and then the photosensitive elements acquire optical signals. In order to reduce the dose of X-rays absorbed by the subject, designers will use materials with high conversion efficiency to make scintillators to improve sensitivity. On the other hand, since the scintillator cannot completely absorb all X-rays, after the residual X-rays pass through the scintillator and the image sensor array, they are scattered on the surface of the detector’s support structure, circuit board and other objects, and part of the scattered light returns to the scintillator again. Because the scintillator emits light on the body, because the scat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146H04N5/235H04N5/32
CPCH01L27/14625H01L27/14629H01L27/14658H04N5/32H04N23/70
Inventor 黄翌敏
Owner IRAY IMAGE TECH TAICANG CO LTD
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