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A multi-layer piezoelectric actuator independent time-sharing drive device and method

A piezoelectric actuator, laminated piezoelectric technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of complex control and high cost, Achieve the effect of improving motion positioning accuracy, low cost and simple operation

Inactive Publication Date: 2019-08-27
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these methods all have the disadvantages of complex control and high cost.

Method used

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  • A multi-layer piezoelectric actuator independent time-sharing drive device and method
  • A multi-layer piezoelectric actuator independent time-sharing drive device and method
  • A multi-layer piezoelectric actuator independent time-sharing drive device and method

Examples

Experimental program
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Effect test

Embodiment 1

[0035] Embodiment 1 Independent time-sharing drive and parallel drive hysteresis measurement

[0036] The piezoelectric actuator used in the experiment is AL 1.65*1.65*5D-4F from NEC Corporation of Japan, with three piezoelectric stacks and a triangular wave signal with a driving signal amplitude of 0-6V to conduct experiments at different signal frequencies. For independent time-sharing drives, follow the figure 1 The structure shown connects the experimental setup. The 0-6V triangular wave driving signal is input to the independent time-sharing driving device (signal separation circuit), through which the signal will be automatically separated into three sub-signals with an amplitude of 0-2V. The three-way sub-signals are amplified 45 times by the corresponding three-way voltage amplifiers and then output to the corresponding piezoelectric stacks. For parallel drive, the 0-6V triangular wave drive signal is directly amplified by 15 times and then connected to the input term...

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Abstract

The invention provides a multi-stack piezoelectric actuator independent time-sharing driving device and method and relates to the application in the field of a precision displacement platform. Each layer of piezoelectric actuators is independently driven. A driving signal is separated into sub signals in time series connection according to a voltage evenly-spaced rule. A signal applied to an independent piezoelectric actuator of each layer is an amplified sub signal. The voltage evenly-spaced rule is achieved by a signal separating circuit. The driving signal may be any desired signal. Compared with the piezoelectric stack with the parallel connection of multiple layers of piezoelectric actuators, according to the driving device of the invention, the hysteresis accumulation due to paralleldriving can be effectively eliminated, only the hysteresis of a piezoelectric actuator of one layer exists at the same moment, the hysteresis in the displacement process of the multiple layers of piezoelectric actuators is effectively reduced, the motion positioning accuracy is improved, the operation is simple, and the cost is low.

Description

technical field [0001] The invention relates to the field of precision micro-displacement platforms, and specifically relates to a multi-layer piezoelectric actuator independent time-sharing driving device and method, which realizes independent time-sharing driving of multi-layer piezoelectric actuators, and then realizes A method to reduce displacement hysteresis. Background technique [0002] In the field of precision translation stages, nanometer precision is often required. Piezoelectric ceramic materials have the characteristics of small size, high resolution, fast frequency response, low noise and large bearing capacity. However, the piezoelectric ceramic itself has hysteresis and creep characteristics, which will limit the precision of the piezoelectric ceramic when it is subjected to precise displacement, and the hysteresis of the piezoelectric ceramic has the greatest impact on the accuracy. Therefore, how to improve or reduce the hysteresis characteristics of pie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/06
Inventor 张连生黄继超陈小波黄强先程荣俊
Owner HEFEI UNIV OF TECH
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