38results about How to "High motion positioning accuracy" patented technology

A photoetching machine workpiece stage magnetic preloading balance positioning system belongs to the field of semiconductor photoetching technology; the system mainly comprises a base stage, a balance mass system, a magnetic preloading system, a motion unit, a silicon wafer stage, and a balance mass drift-resistant system; the balance mass system comprises two frames which nest each other, and has freedom degrees in the X and Y directions; the motion unit is disposed at the upper part; the impact force caused by the motion part to the base stage is weakened by momentum conservation principle;the balance mass drift-resistant system is used to compensate the position displacement of the balance mass system caused by external resistance during working; the magnetic preloading system is usedfor real-time compensation of the torsion of the workpiece stage along a Z axis; the invention can effectively reduce internal vibration, compensate the torsion of the workpiece stage along the Z axis, and thus greatly improve the motion positioning precision of the silicon wafer stage.

The invention discloses a control method of a multi-section peristaltic snake-like robot running in a nuclear fusion cabin. The control method is characterized in that a front section side positioning module and a rear section side positioning module are symmetrically arranged at two ends of a middle section axial moving module to form a walking mechanism, the walking mechanism is used as at least two creeping units, the at least two creeping units are serially connected to form the multi-section peristaltic snake-like robot, and adjacent creeping units are connected by using two telescopic elastic universal joints. By using the control method disclosed by the invention, a locomotion gait similar to multi-section worm walking can be realized, the running stability is good, the control is simple; a movement locus can be across a large dual-ring groove at the bottom of the whole nuclear fusion cabin, and the all-dimensional vision information acquisition of a space inside the nuclear fusion cabin is realized by carrying a vision observing cloud deck.

A work station cable apparatus comprises a work station (110), a silicon wafer station (120), a cable device (130), a cable connection station (140), an X-direction moving device and a Y-direction moving device. The silicon wafer station (120) and the cable connection station (140) are respectively mounted on the upper side and the lower side of the work station (110). The two ends of the cable device (130) are connected to the silicon wafer station (120) and the cable connection station (140) respectively. The X-direction and Y-direction moving devices are both connected to the cable connection station (140) and respectively drive the cable connection station (140) to move following the silicon wafer station (120) along the X-direction and the Y-direction. The cable connection station (140) drives the cable device (130) to synchronously move following the silicon wafer station (120) along the X-direction and the Y-direction, thus being able to reduce disturbance of the cable device (130) to the motion of the silicon wafer station (120), reduce the bending times of the cable device (130) and prolong the service life of the cable device.

The invention provides an active driving wire cable table of a silicon wafer stage of a lithography machine. The active driving wire cable table comprises a Y-direction sliding table, a Y-direction guide rail and a cross-telescopic linkage mechanism, wherein the Y-direction sliding table is disposed on the Y-direction guide rail through an air bearing; the Y-direction sliding table is driven by a sliding table motor and moves synchronously in the Y direction and on the silicon wafer stage; wire cable instrument is conveyed to the silicon wafer stage along the cross-telescopic linkage mechanism through the Y-direction sliding table; the cross-telescopic linkage mechanism comprises a cross telescopic connecting rod and a driver; one end of the cross telescopic connecting rod is connected with the Y-direction sliding table; the other end of the cross telescopic connecting rod is connected with the silicon wafer stage through the wire cable instrument; and the driver is used for driving the cross telescopic connecting rod to move along with an X direction, so that the wire cable is driven to move along the X direction. The active driving wire cable table of the silicon wafer stage of the lithography machine can realize active control of the wire cable table and follow motion of the wire cable table to the silicon wafer stage in an X-Y plane.

The invention discloses a visual observation mechanism working in a nuclear fusion chamber and a control method thereof. The visual observation mechanism is characterized in that a front body segment lateral positioning module and a rear body segment lateral positioning module are symmetrically arranged at two ends of a middle body segment axial motion module to form a traveling mechanism; a visual observation cloud deck is arranged at the front part of the front body segment lateral positioning module; the front body segment lateral positioning module and the middle body segment axial motion module are connected by a front double universal joint; the rear body segment lateral positioning module and the middle body segment axial motion module are connected by a rear double universal joint. According to the visual observation mechanism disclosed by the invention, the traveling mechanism is wide in motion range; the traveling track of the traveling mechanism can extend all over the complete cycle of a large-double circular channel at the bottom of the nuclear fusion chamber; the visual observation cloud deck is arranged in a matching way, so that all-round visual information acquisition of an annular space with a D-shaped section inside the nuclear fusion chamber can be finished.

The invention discloses a multi-section peristaltic snakelike robot working in a nuclear fusion bin. The multi-section peristaltic snakelike robot working in the nuclear fusion bin is characterized in that each walking mechanism is composed of a front body section lateral positioning module and a rear body section lateral positioning module symmetrically arranged at the two ends of a middle body section axial movement module, the walking mechanisms serve as wriggling units, at least two wriggling units are connected in series to form the multi-section peristaltic snakelike robot, and the adjacent wriggling units are connected through telescopic elastic double universal joints. The movement track of the multi-section peristaltic snakelike robot can cover a whole large double annular groove way in the bottom of the nuclear fusion bin, the movement gait is like walking of a multi-section worm, movement stability is good, control is simple, and omnibearing visual information collection of the internal space of the nuclear fusion bin can be realized by mounting a visual observation cloud platform.

The invention discloses a window scanning type exposure device. The device is installed coplanarly through four blades, a rectangular window is formed at the position of a gap between a quartz strip and an exposure window, high-resolution projection type exposure control is carried out, and simultaneously, convenient change of easily consumable optical elements and the temperature control of the optical elements and light blocking elements under long-time laser environment can be realized. The invention can be used for establishing the projection type exposure device with high resolution and high movement/positioning precision.

The invention provides a multi-stage vibration isolation system for a precise instrument, first deep groove vibration isolation trenches are annularly arranged in a foundation, and the first deep groove vibration isolation trenches are used for dividing the foundation into an outer foundation and an inner foundation; a precise instrument is arranged on the inner foundation, and the first deep groove vibration isolation trenches are filled with the first vibration isolation medium, so that vibration reduction is performed in multiple aspects, vibration excited by a moving part and ground low-frequency random vibration can be decoupled, and vibration on the main substrate is reduced from a vibration source by blocking a transmission path of disturbance force of the moving part. Different high-damping vibration isolation materials are selected as first vibration isolation media according to broadband vibration and narrow-band vibration, the first deep groove vibration isolation grooves are filled in a series connection mode so as to meet the high-precision requirement for silicon wafer positioning, in this way, moving parts and the main substrate are separated through the vibration isolators, vibration sources can be reduced, vibration is greatly reduced, and the motion positioning precision of a silicon wafer in a photoetching machine is improved.

The invention discloses a worm-simulation robot walking mechanism running in a nuclear fusion compartment and a control method thereof. The worm-simulation robot walking mechanism is characterized by comprising an anterior somite lateral positioning module and a posterior somite lateral positioning module which are symmetrically arranged at two ends of a middle somite axial moving module, wherein the anterior somite lateral positioning module is connected to the middle somite axial moving module through two front universal joints; the posterior somite lateral positioning module is connected to the middle somite axial moving module through two rear universal joints. The moving track of the worm-simulation robot walking mechanism covers a large double-ring channel at the bottom of the whole nuclear fusion compartment; the moving pace is similar to the walking of worms; the mechanism is excellent in running stability and simple to control; three-freedom-degree all-direction visual information acquisition of the inner space of the nuclear fusion compartment can be implemented by carrying a visual observation platform.

The invention discloses a two-dimensional long-stroke table movement system, which comprises a bearing platform, a first direction movement device and two second direction movement devices. The first direction movement device comprises a first direction guide rail, a first direction sliding table and a first direction motor. The two direction movement devices are respectively connected to the two sides of the first direction movement device. Each second direction movement device comprises a second direction guide rail, a second direction sliding table and a two-dimensional motor. The second direction sliding tables can be suspended above the second direction guide rails slidingly along the first direction and the second direction, and are connected to the first direction guide rail. The two-dimensional motors are connected to the second direction sliding tables, and drive the second direction sliding tables and the first direction movement device to do 1-2 mm small-stroking motion in the first direction while doing long-stroking motion along the second direction. According to the two-dimensional long-stroke table movement system disclosed by the invention, the mechanical structure is simplified, and the cost is reduced.

The invention belongs to the technical field of medical equipment, an relates to an operation table for a puncture robot. The operation table comprises a stand column and a control cabinet. A liftinglocking mechanism is arranged at the top of the stand column, the puncture robot is arranged at the top of the lifting locking mechanism, a connecting piece is arranged at the bottom of the stand column, the control cabinet is detachably connected with the stand column through a connecting piece, under the connecting state, the control cabinet can rotate around the stand column, and a movable mechanism is arranged between the bottom of the stand column and the bottom of the control cabinet. By arranging the lifting locking mechanism, the puncture robot can be rapidly lifted; by adopting rotational connection between the control cabinet and the stand column, puncture in the multi-angle and multi-direction puncture mode can be achieved; by adopting the detachable connection mode of the control cabinet and the stand column, separation of the control cabinet and the stand column of the puncture robot can be achieved, more space can be emptied so that great convenience can be brought to work of medical workers and the puncture robot, and the operation table has the high market value and is worthy of being popularized.