Two-dimensional long-stroke table movement system

Abstract

The invention discloses a two-dimensional long-stroke table movement system, which comprises a bearing platform, a first direction movement device and two second direction movement devices. The first direction movement device comprises a first direction guide rail, a first direction sliding table and a first direction motor. The two direction movement devices are respectively connected to the two sides of the first direction movement device. Each second direction movement device comprises a second direction guide rail, a second direction sliding table and a two-dimensional motor. The second direction sliding tables can be suspended above the second direction guide rails slidingly along the first direction and the second direction, and are connected to the first direction guide rail. The two-dimensional motors are connected to the second direction sliding tables, and drive the second direction sliding tables and the first direction movement device to do 1-2 mm small-stroking motion in the first direction while doing long-stroking motion along the second direction. According to the two-dimensional long-stroke table movement system disclosed by the invention, the mechanical structure is simplified, and the cost is reduced.

Description

technical field [0001] The invention relates to a worktable movement system, in particular to a two-dimensional long-stroke worktable movement system. Background technique [0002] In semiconductor lithography equipment, the motion system of precision workpiece stages such as silicon wafer stage and mask stage is an extremely important key component. Its positioning accuracy directly affects the performance of lithography equipment, and its operating speed directly affects the production efficiency of lithography equipment. The main functions that the workpiece table motion system usually needs to complete are: material transmission, fast stepping, uniform scanning, etc., and at the same time require high motion positioning accuracy in the X and Y directions. Its mechanical structure also usually adopts linear motor-air floating structure. [0003] The typical structure of the linear motor-air-floating precision workpiece table motion system is as follows: the bearing table...

AI Technical Summary

Problems solved by technology

However, the workpiece table motion system based on this structural form has a relatively complex structure; the design and manufacturing of the flexible block is more difficult, and at the same time reduces the structural rigidity of the system; the Y-direction long-stroke motion guide adopts two-dimensional guide rails, and the cost is high

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