Active driving wire cable table of silicon wafer stage of lithography machine
A technology of active drive and silicon wafer stage, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of complex cable stage structure, high development cost, and large number of drivers, and achieve mechanical structure and control. The algorithm is simple, the motion positioning accuracy is improved, and the scalability is good.
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[0030] In order to better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.
[0031] The present invention proposes a silicon wafer stage cable stage using a cross telescopic linkage mechanism applied to a photoetching machine, and is particularly suitable for a workpiece stage movement system that uses a planar motor to achieve long-stroke coarse movement of the silicon wafer stage. The dual-workpiece system of the H-shaped structure is also applicable.
[0032] figure 1 Shown is a schematic diagram of the structure of the active drive cable stage of the silicon wafer stage of the lithography machine according to Embodiment 1 of the present invention. figure 2 Shown is a schematic diagram of the cross telescopic linkage mechanism installed on the screw nut in Embodiment 1; image 3 Shown is a schematic diagram of the cross telescopic linkage mechanism in Example 1. Please also refer t...
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