Ozone supply device and ozone supply method

A supply device and ozone technology, applied in the direction of ozone preparation, separation methods, chemical instruments and methods, etc., can solve the problems of inability to supply ozone, achieve the effect of improving ozone utilization efficiency and inhibiting self-decomposition

Active Publication Date: 2018-08-31
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the disclosed inventions of the above-mentioned Patent Documents 1-3, since the desorption of ozone is performed after a need arises, there is a problem that ozone cannot be supplied immediately in response to an ozone request.

Method used

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  • Ozone supply device and ozone supply method
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  • Ozone supply device and ozone supply method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0037] Embodiment 1 relates to an ozone supply device and an ozone supply method. The above-mentioned ozone supply device includes an ozone generator, an adsorption tower filled with an adsorbent inside, a standby unit for making ozonized gas stand by, a decompression device, and an ozone generator for supplying ozonized gas. A supply unit, a low-temperature refrigerant circulator for cooling the adsorbent, and a control unit for adsorbing the ozonated gas on the adsorbent and desorbing the ozonated gas adsorbed on the adsorbent to concentrate, the ozone supply method includes an adsorption step, Concentration process, standby process and supply process.

[0038] In the following, based on the system schematic diagram showing the structure of the ozone supply device, that is figure 1 , The flowchart of the ozone supply method is figure 2 , The explanatory diagram of the comparative example is image 3 , The schematic diagram of the process of the ozone supply device is Fi...

Embodiment approach 2

[0127] The ozone supply apparatus of Embodiment 2 adds a pressure gauge to the ozone supply apparatus 100 of Embodiment 1, and controls the pressure in the adsorption tower 3 and the standby part 7.

[0128] Hereinafter, based on a system schematic diagram showing the structure of the ozone supply device of Embodiment 2, that is Figure 10 , and the characteristic diagram showing the relationship between the pressure in the adsorption tower of the ozone supply device and the purity of ozone is Figure 11 , the ozone supply device of Embodiment 2 will be described centering on differences from Embodiment 1. exist Figure 10 , with Embodiment 1’s figure 1 The same or equivalent parts are denoted by the same reference numerals as in the first embodiment.

[0129] The basic structure of the ozone supply apparatus of Embodiment 2 is the same as that of the ozone supply apparatus 100 of Embodiment 1, but in the ozone supply apparatus 200, the pressure gauge 204 is provided in the...

Embodiment approach 3

[0137] The ozone supply apparatus of Embodiment 3 adds an ozone meter to the ozone supply apparatus 100 of Embodiment 1, and controls the ozone purity and ozone partial pressure in the adsorption tower 3 and the standby part 7.

[0138] Hereinafter, based on a system schematic diagram showing the structure of an ozone supply device according to Embodiment 3, Figure 12 , the ozone supply device of Embodiment 3 will be described centering on differences from Embodiment 1. exist Figure 12 , with Embodiment 1’s figure 1 The same or equivalent parts are denoted by the same reference numerals as in the first embodiment.

[0139] The basic structure of the ozone supply apparatus 300 of Embodiment 3 is the same as that of the ozone supply apparatus 100 of Embodiment 1, but in the ozone supply apparatus 300, the ozone meter 24 is provided in the rear stage of the adsorption tower 3.

[0140] The ozonometer 24 measures the ozone purity and ozone partial pressure in the adsorption t...

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Abstract

The present invention includes an ozone generator (2); an adsorption column (3); a standby section (7); a pressure reducing device (8); an ozone supply section (9); a low temperature coolant circulator (5); and a control section (10) that adsorbs generated ozonated gas into a cooled adsorbent (4), desorbs the ozonated gas adsorbed into the adsorbent (4), and concentrates the same. The control section (10) reduces the pressure inside the adsorption column (3) in a standby state in which the ozonated gas desorbed from the adsorbent (4) of the adsorption column (3) is kept in standby in the standby section (7) to a pressure lower than the pressure inside the adsorption column (3) during adsorption.

Description

technical field [0001] The present invention relates to an ozone supply device and an ozone supply method for concentrating and storing ozone by utilizing an adsorption phenomenon. Background technique [0002] Ozone is used as a powerful oxidizing agent in various fields such as water environment purification and semiconductor cleaning. With the rise of environmental awareness in recent years, the demand for high-concentration and high-efficiency ozone generation technology is increasing. The upper limit of the purity of ozone generated by a single ozone generator is about 20% by volume, and since ozone has the property of self-decomposition, it is difficult to store it in the gaseous phase at normal temperature. In order to perform intermittent ozone treatment, it is necessary to generate ozone each time. A method of storing and concentrating ozone by utilizing an adsorption phenomenon and intermittently supplying a high-purity ozonated gas is disclosed (for example, Pate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B13/10B01D53/04B01D53/047
CPCC01B13/10B01D53/047B01D53/0454B01D2253/106B01D2256/14B01D2259/40009B01D2259/4525
Inventor 中川雄介松浦洋航和田升中村保博
Owner MITSUBISHI ELECTRIC CORP
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