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Semiconductor device including a resistor

A technology of semiconductors and resistors, applied in the field of semiconductor devices

Active Publication Date: 2018-09-14
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The increased length of the resistors results in larger resistors occupying a larger area in semiconductor devices, which presents a problem as semiconductor devices become smaller

Method used

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  • Semiconductor device including a resistor
  • Semiconductor device including a resistor
  • Semiconductor device including a resistor

Examples

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Embodiment Construction

[0025] Various example embodiments will be described more fully with reference to the accompanying drawings, in which some example embodiments are shown. However, inventive concepts may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

[0026] figure 1 is a perspective view illustrating a semiconductor device according to some embodiments of the inventive concept. Figure 2A shows a semiconductor device according to some embodiments, and is along the figure 1 Sections taken by lines I-I' and II-II'. Figure 2B shows a semiconductor device according to some embodiments, and is along figure 1 The section taken by the line III-III'.

[0027] refer to figure 1 , Figure 2A and Figure 2B , the resistor structure 57r may be provided on the semiconductor substrate 3 . In some embodiments, the resistor structure 57r may be disposed on the isolation region 6s on the semiconductor substrate 3 . The semiconductor su...

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Abstract

A semiconductor device is provided including a resistor structure on a semiconductor substrate. The resistor structure includes pad portions and a resistor body connecting the pad portions. The pad portions each have a width greater than a width of the resistor body. The pad portions each include a pad pattern and a liner pattern covering a sidewall and a lower surface of the pad pattern. The resistor body extends laterally from the liner pattern. The pad pattern includes a different material from the resistor body and the liner pattern.

Description

[0001] Cross References to Related Applications [0002] This application claims priority based on 35 U.S.C. §119 from Korean Patent Application No. 10-2017-0027699 filed with the Korean Intellectual Property Office on March 3, 2017, the entire disclosure of which is hereby incorporated by reference. technical field [0003] Embodiments of the inventive concepts relate generally to semiconductor devices, and more particularly, to semiconductor devices including resistors. Background technique [0004] Semiconductor devices generally include transistors, diodes, capacitors, resistors, and the like. In a semiconductor device including a resistor, the resistor is generally formed of a low-resistivity metal used to form a gate electrode or an interconnection line, so the length of the resistor needs to be increased to satisfy a desired resistance magnitude of the resistor. The increased length of the resistors results in larger resistors occupying a larger area in the semicondu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/64H01L27/02
CPCH01L23/647H01L27/0203H01L28/20H01L27/0629H01L27/0802H01L28/24H01L29/785H01L27/0738H01L24/06H01L29/435H01L21/31051H01L21/76895H01L29/4983
Inventor 禹孝锡尹壮根任峻成黄盛珉
Owner SAMSUNG ELECTRONICS CO LTD