A structure and method of fabricating reversible fuse and
antifuse structures for
semiconductor devices is provided. In one embodiment, the method includes forming at least one line having a via opening for exposing a portion of a plurality of interconnect features; conformally depositing a first material layer over the via opening; depositing a second material layer over the first material layer, wherein the depositing overhangs a portion of the second material layer on a top portion of the via opening; and depositing a
blanket layer of insulating material, where the depositing forms a plurality of fuse elements each having an airgap between the insulating material and the second material layer. The method further includes forming a plurality of electroplates in the insulator material connecting the fuse elements. In another embodiment, the method includes depositing a first and a second material layer on a
semiconductor substrate, wherein the second material layer having a higher electrical
conductivity than the first material layer; selectively
etching the first and second material layer to create at least one constricted region to facilitate
electromigration of the second material; wherein the
electromigration creates a plurality of micro voids; and forming a plurality of
electrical contacts on the second material layer.