A method of manufacturing a
resistor-
transistor-logic circuit with GaN structures, including steps of forming a GaN layer, an AlGaN
barrier layer and a p-type doped GaN capping layer on a substrate, patterning the p-type doped GaN capping layer into multiple p-type doped GaN capping patterns, wherein the GaN layer under parts of the p-type doped GaN capping patterns is converted into gate depletion regions, and the GaN layer not covered by the p-type doped GaN capping patterns in a
resistor region functions as 2DEG resistors, forming a
passivation layer on the GaN layer and the p-type doped GaN capping patterns, forming multiple sources and drains on the GaN layer, and forming multiple gates on the p-type doped GaN capping patterns, wherein the gates, sources and drains in a high-
voltage device region constitute high-
voltage HEMTs, and the gates, sources and drains in a low-
voltage device region constitute low-voltage logic FETs.