36results about How to "Low ion density" patented technology

First and second gate insulating films are formed so as to cover at least the upper corner of first and second fin-shaped semiconductor regions. The radius of curvature r1′ of the upper corner of the first fin-shaped semiconductor region located outside the first gate insulating film is greater than the radius of curvature r1 of the upper corner of the first fin-shaped semiconductor region located under the first gate insulating film and is less than or equal to 2×r1. The radius of curvature r2′ of the upper corner of the second fin-shaped semiconductor region located outside the second gate insulating film is greater than the radius of curvature r2 of the upper corner of the second fin-shaped semiconductor region located under the second gate insulating film and is less than or equal to 2×r2.

A plasma reactor is described that includes a vacuum chamber defined by an enclosure including a side wall and a workpiece support pedestal within the chamber defining a processing region overlying said pedestal. The chamber has at least a first pair of ports near opposing sides of said processing region and a first external reentrant tube is connected at respective ends thereof to the pair of ports. The reactor further includes a process gas injection apparatus (such as a gas distribution plate) and an RF power applicator coupled to the reentrant tube for applying plasma source power to process gases within the tube to produce a reentrant torroidal plasma current through the first tube and across said processing region. A magnet controls radial distribution of plasma ion density in the processing region, the magnet having an elongate pole piece defining a pole piece axis intersecting the processing region.

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning film and a liquid crystal display component. The liquid crystal display component has the advantages of low ion density, excellent long-term reliability and suitability to be applied for a plurality of driving modes. According to the invention, the liquid crystal aligning agent is formed by the liquid crystal aligning agent which comprises the polyamic acid that is taken as the reaction product of specific diamine and tetracarboxylic dianhydride or the derivative thereof, and the epoxide that has average functional base larger than 1 and has epoxy group. Furthermore a liquid crystal display component with the liquid crystal aligning film is composed.

The invention relates to a diamine, a polymer obtained from a reaction with the presence of the diamine, a liquid crystal aligning agent containing the polymer, a liquid crystal alignment layer and a liquid crystal display device, wherein the diamine contains alkaline nitrogen atoms in diphenylamine structure at two parts of a molecule, so that the diamine reacts with tetracarboxylic dianhydride to obtain a liquid crystal aligning agent containing polyamide acids or derivatives thereof. Moreover, the liquid crystal display device made of the liquid crystal alignment layer formed by the liquid crystal aligning agent exhibits low ion density and long-term reliability.

Provided is a liquid crystal display device including first and second opposing substrates, a liquid crystal layer containing a liquid crystal composition between the first and second substrates, thin-film transistors disposed on the first substrate, and pixel electrodes that are driven by the transistors and that are made of a transparent conductive material. Each thin-film transistor includes a gate electrode, an oxide semiconductor layer disposed over the gate electrode with an insulating layer therebetween, and source and drain electrodes electrically connected to the oxide semiconductor layer. The liquid crystal composition contains at least one compound selected from the group consisting of compounds represented by general formulas (LC3) to (LC5) and at least one compound selected from the group consisting of compounds represented by general formulas (II-a) to (II-f).

The invention relates to a liquid crystal alignment agent comprising a polymer composition (A), a solvent (B), and a poly(oxyalkyleneglycol)dialkylether compound (C); wherein the number average molecular weight of the poly(oxyalkyleneglycol)dialkylether compound (C) is from 250 to 2000. The invention also provides a liquid crystal alignment film made by the liquid crystal alignment agent as mentioned above and a liquid crystal display element comprising the liquid crystal alignment film, and the liquid crystal display element has high voltage holding rate and low ion density.

Provided is a liquid crystal display device including first and second opposing substrates, a liquid crystal layer containing a liquid crystal composition between the first and second substrates, a plurality of gate lines and data lines arranged in a matrix on the first substrate, thin-film transistors disposed at intersections of the gate lines and the data lines, and pixel electrodes that are driven by the transistors and that are made of a transparent conductive material. Each thin-film transistor includes a gate electrode, an oxide semiconductor layer disposed over the gate electrode with an insulating layer therebetween, and source and drain electrodes electrically connected to the oxide semiconductor layer. The liquid crystal composition contains at least one compound selected from the group consisting of compounds represented by general formulas (LC1) and (LC2) and at least one compound selected from the group consisting of compounds represented by general formulas (II-a) to (II-f).

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning layer and a liquid crystal display device. The objective of the invention is to develop a usable liquid crystal aligning agent used for a liquid crystal display device having high voltage holding rate and implementing the stability of the voltage holding rate for a long time. The liquid crystal aligning agent contains polyamic acid or its derivatives obtained by reacting tetracarboxylic dianhydride with special diamine using a bivalence organic group containing nitrogen atoms as residue.

The invention provides an insulating ring, a pre-cleaning chamber and semiconductor processing equipment. The insulating ring is applied to the pre-cleaning chamber. A base is arranged in the pre-cleaning chamber; the base comprises a first bearing surface for bearing the center area of the lower surface of a wafer; the insulating ring is arranged on the base and surrounds the edge of the first bearing surface; the insulating ring comprises a ring-shaped body, the ring-shaped body is provided with a second bearing surface and a ring-shaped boss, the second bearing surface and the edge area of the lower surface of the wafer are arranged oppositely, the ring-shaped boss surrounds the edge of the second bearing surface, and the upper surface of the ring-shaped boss is higher than that of the wafer. According to the insulating ring provided in the invention, the etching rate of the edge area of the wafer can be reduced, the difference between the etching rate of the edge area of the wafer and the etching rate of the center area of the wafer can be reduced, and the etching uniformity can be further improved.

The invention relates to a diamine, a liquid crystal aligning agent and a liquid crystal display element, and provides a liquid crystal display element which is low in ion density and excellent in long-term reliability, a liquid crystal alignment layer having such properties, a liquid crystal aligning agent forming the liquid crystal alignment layer, a polymer used in the liquid crystal aligning agent and a diamine, serving as a raw material of the polymer. The liquid crystal aligning agent employs the polymer which is obtained through reaction between a special diamine having a triazine structure and a tetracaboxylic dianhydride. The liquid crystal display element containing the liquid crystal liquid alignment layer formed by the liquid crystal aligning agent has the properties of low-density of ions and long term reliability.

The invention relates to a liquid crystal alignment agent and a liquid crystal alignment film and a liquid crystal display element formed from the liquid crystal alignment agent. The liquid crystal alignment agent contains a polymer composition, a polysiloxane, and a solvent. The polymer composition is obtained by subjecting a mixture including a tetracarboxylic dianhydride component and a diamine component to a reaction. The diamine component includes first and second diamine compounds. The polysiloxane contains an epoxy-based group. A liquid crystal alignment film is formed by a foresaid liquid crystal alignment agent. A liquid crystal display element comprises the liquid crystal alignment film.

A method for making low emissivity panels, including control the ion characteristics, such as ion energy, ion density and ion to neutral ratio, in a sputter deposition process of a layer deposited on a thin conductive silver layer. The ion control can prevent or minimize degrading the quality of the conductive silver layer, which can lead to better transmittance in visible regime, block more heat transfer from the low emissivity panels, and potentially can reduce the requirements for other layers, so that the overall performance, such as durability, could be improved.