Clearance control method for adhesion of tube target

Abstract

The invention discloses a clearance control method for adhesion of a tube target. The method comprises a back tube and a tube target material; the back tube is prepared from titanium or stainless steel; the tube target material is prepared from metal or ceramic; the outer side of the tube target material is provided with a regulating ring; the tube target material and the back tube are coated withthe regulating ring; the regulating ring comprises an inner ring body, an outer ring body and sealing flanges, wherein the sealing flanges are arranged at the two end faces; the sealing flange at oneend is provided with a regulating component which is used for regulating the same-diameter distance from the inner ring body to the outer ring body; the inner side surface of the inner ring body adheres to the tube target material; and in a using process, the regulating component is used for regulating the inner ring body to adhere to the tube target material, is locked and is then heated. The method disclosed by the invention is used for effectively controlling a clearance between the back tube and the tube target material.

Description

technical field [0001] The invention relates to the application field of a method for controlling a gap, in particular to a method for controlling a gap by laminating a tube target. Background technique [0002] At present, in the process of laminating the tube target, two different materials are usually bonded together, such as the back tube and the tube target. The back tube generally chooses metal such as titanium or stainless steel, and the tube target usually chooses metal or Ceramics and tube targets need to be heated, but due to the different expansion coefficients of metal and metal or metal and ceramics, it is very difficult to control the consistency of the gap between the back tube and the tube target, and the back tube is easy to crack the tube target , resulting in defective products. Contents of the invention [0003] In order to solve the above-mentioned problems in the background technology, the purpose of the present invention is to provide a method for c...

AI Technical Summary

Problems solved by technology

[0002] At present, in the process of laminating the tube target, two different materials are usually bonded together, such as the back tube and the tube target. The back tube generally chooses metal such as titanium or stainless steel, and the tube target usually chooses metal or Ceramics and tube targets need to be heated, but due to the different expansion coefficients of metal and metal or metal and ceramics, it is very difficult to control the consistency of the gap between the back tube and the tube target, and the back tube is easy to crack the tube target , resulting in defective

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