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A method of converting the coordinates of a-s universal sample stage to the coordinates of afm sample stage

A technology of coordinate transformation and sample stage, which is applied in the direction of instruments, measuring devices, scanning probe microscopy, etc., can solve the problems of positioning dependence and positioning failure, and achieve the effect of improving work efficiency and enriching cognition

Active Publication Date: 2021-04-06
SOUTH CHINA UNIV OF TECH
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Problems solved by technology

[0006] At this stage, there are also instrument sets equipped with a positioning function on the market that can reproduce a specific area with sub-micron precision in the same brand of SEM and AFM, but this positioning depends on the sample holder of the brand. When the sample is taken from the After the sample pedestal is removed and put back again, the positioning fails

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  • A method of converting the coordinates of a-s universal sample stage to the coordinates of afm sample stage
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  • A method of converting the coordinates of a-s universal sample stage to the coordinates of afm sample stage

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Embodiment Construction

[0029] Such as figure 1 and figure 2 As shown, the present invention provides a method for converting the coordinates of the A-S universal sample stage into the coordinates of the AFM sample stage, comprising the following steps:

[0030] (1) First observe the A-S universal sample stage with the sample in the SEM to find the target area; first process the coordinate grid on the A-S universal sample stage, mark the coordinate origin O and process the positioning mark on the abscissa axis Point A (a, 0), process the positioning mark point B (0, b) on the ordinate axis;

[0031] (2) Record the target coordinates of the area on the A-S universal sample stage;

[0032] (3) Transfer the A-S universal sample stage to the AFM sample stage to obtain the new coordinates of the target coordinates in the AFM sample stage;

[0033] (31) Reset the position of the AFM sample stage to zero, that is, set the platform position of the AFM to place the thin-section sample at the default (0, 0...

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Abstract

The invention provides a method for converting the coordinates of the A-S universal sample stage into the coordinates of the AFM sample stage, comprising the following steps: (1) first observing the A-S universal sample stage with samples in the SEM, finding Target area; (2) Record the target coordinates of this area; (3) Transfer the A-S universal sample stage to the AFM sample stage to obtain the new coordinates of the target coordinates in the AFM sample stage. The method for converting the coordinates of the A-S universal sample stage into the coordinates of the AFM sample stage provided by the present invention solves the relocation of the target point coordinates after the A-S universal sample stage is transferred to the AFM sample stage, and realizes the coordination between SEM and AFM Combined use greatly improves the working efficiency of AFM and greatly enriches researchers' understanding of nanomaterials.

Description

technical field [0001] The invention relates to a method for converting the coordinates of the A-S universal sample stage into the coordinates of the AFM sample stage. Background technique [0002] The atomic force microscope is a testing instrument that obtains the three-dimensional topography of the sample surface according to the magnitude of the interaction force between the probe and the sample. powerful tool for the comprehensive nature of the district. However, AFM is limited by the deformation range of piezoelectric ceramics, and cannot realize the continuous change of the target field of view from macroscopic to microscopic like electron microscopes. The only way to find a suitable target area during testing is to rely on the optical microscope that comes with the AFM instrument, which has a low resolution. In nanomaterial testing, the target area cannot be effectively identified, and it often takes a lot of time to find the test target, which seriously affects the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24G01Q30/02
CPCG01Q30/02G01Q60/24
Inventor 刘金超
Owner SOUTH CHINA UNIV OF TECH
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