Acoustic sensor with energy acquisition function and production method thereof
An acoustic sensor and energy collection technology, applied in the direction of electret electrostatic transducer, etc., can solve the problems of non-response, neglect of acoustic signal energy, etc.
Pending Publication Date: 2018-10-12
HANGZHOU DIANZI UNIV
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Problems solved by technology
There is a problem with the traditional capacitive acoustic sensor, it hardly responds to the external low frequency signal, such as 10~50Hz, which causes part of the energy of the acoustic signal to be ignored
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[0049] The technical features and implementation steps of the present invention will be described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings, so as to facilitate understanding.
[0050] Such as figure 1 and 2 , an acoustic sensor with energy harvesting function, which includes silicon substrate 1, SiO 2 Etch stop layer 2, polysilicon coil 3, SiO 2 Diaphragm support layer 4, polysilicon diaphragm layer 5, SiO 2 Back electrode support layer 6, SiNx insulating layer 7, polysilicon backplane layer 8, Al 2 o 3 Passivation layer9. Wherein, the thickness of silicon substrate 1 is 300-500um; SiO 2 Etch stop layer 2, SiO 2 The diaphragm support layer 4 is SiO with a thickness of 200-1000nm 2 Thin film; polysilicon diaphragm layer 5 is a polysilicon thin film with a thickness of 100-500nm; SiO 2 The back electrode support layer 6 is 300-500um SiO 2 layer; the SiNx insulating layer 7 is a SiNx film of 200-500nm; the ...
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The invention relates to an acoustic sensor with an energy acquisition function and a production method thereof. An existing conventional capacitive acoustic sensor nearly does not respond to an outside low-frequency signal, resulting in that part of energy of an acoustic signal is ignored. The acoustic sensor sequentially comprises a silicon substrate, a SiO2 etching stop layer, a polycrystallinesilicon coil, a SiO2 vibration diaphragm supporting layer, a polycrystalline silicon vibration diaphragm layer, a SiO2 back electrode supporting layer, a SiNx insulation layer, a polycrystalline silicon backplane layer and an Al2O3 passivation layer from bottom to top. The polycrystalline silicon coil which is of a square spiral line shape is positioned between the SiO2 etching stop layer and theSiO2 vibration diaphragm supporting layer and embedded in the SiO2 vibration diaphragm supporting layer. The polycrystalline silicon vibration diaphragm layer is erected on a back cavity and separates the back cavity from a vibration cavity, and a circular ring shaped magnetic coil is adhered to the lower surface of the polycrystalline silicon vibration diaphragm layer. The acoustic sensor is very sensitive for a low-frequency signal, and not only performance of the acoustic sensor can be met, but also energy acquisition can be implemented.
Description
technical field [0001] The invention belongs to the technical field of silicon micromachining, and relates to an acoustic sensor with energy collection function and a manufacturing method thereof. Background technique [0002] The traditional acoustic sensor is a device that can receive sound waves and convert the sound signals into electrical signals that can be recognized by electrical measuring instruments, so that acoustic quantities that are not easy to be measured can be easily measured, and sound waves are widely used by people. research and utilization. The working principle of a typical acoustic sensor is the conversion of sound to electricity, that is, the sound signal that is difficult to measure is converted into an electrical signal that is easily measured by an electrical measuring instrument. At present, the most widely used acoustic sensors mainly fall into three categories: moving coil, piezoelectric ceramic and capacitive. Other types, if subdivided, also ...
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IPC IPC(8): H04R19/01
CPCH04R19/01Y02P70/50
Inventor 吴丽翔王俊力王高峰
Owner HANGZHOU DIANZI UNIV