A vibration-sensing corrugated diaphragm, an optical fiber acceleration sensor and a micro-vibration detection system

Abstract

The invention discloses a vibration-sensing corrugated diaphragm, and an optical fiber acceleration sensor and a micro-vibration detection system based on the vibration-sensing corrugated diaphragm. The vibration-sensing corrugated diaphragm comprises a composite film and a plurality of annular masses, the overall shape of the composite film is a disk structure with a uniform wall thickness, the lower surface of the composite film is provided with a plurality of grooves recessed upwardly, the plurality of grooves comprise a central groove and a plurality of annular grooves, the center groove and the annular grooves have the same depth, the central groove and the annular grooves are respectively arranged concentrically with the composite film, the central groove and the plurality of annulargrooves are provided with the plurality of annular masses in one-to-one correspondence, the outer wall of the annular mass is matched with the inner wall of the corresponding groove, the thickness ofthe annular mass is smaller than the depth of the corresponding groove, the upper end surface of the annular mass abuts against the top wall of the corresponding groove, and the lower end surface ofthe annular mass is higher than the lower surface of the composite film to form a corrugated shape of the diaphragm. The vibration-sensing corrugated diaphragm has the advantages of improving the sensitivity of the micro-vibration detection and realizing the miniaturization of the optical fiber acceleration sensor.

Description

technical field [0001] The invention relates to an optical fiber acceleration sensor, in particular to a vibration-sensing corrugated diaphragm, an optical fiber acceleration sensor and a micro-vibration detection system. Background technique [0002] The interferometric fiber optic accelerometer is a new type of accelerometer based on the principle of optical signal detection displacement. Compared with traditional mechanical accelerometers, interferometric fiber optic accelerometers have the advantages of small size, light weight, large dynamic range, and anti-electromagnetic interference. It has an important application prospect in forming an all-fiber inertial system, and it can also be used in earthquake monitoring, security early warning, and health monitoring of bridges and other structures. [0003] The existing interference-type diaphragm-type optical fiber accelerometer uses a simple metal sheet as the elastic diaphragm, on which a mass block is fixed. The range ...

AI Technical Summary

Problems solved by technology

[0003] The existing interference-type diaphragm-type optical fiber accelerometer uses a simple metal sheet as the elastic diaphragm, on which a mass block is fixed. The range is small; the existing acceleration diaphragms made with MEMS processing technology still have limitations such as large diaphragm stress and high material rigidity

Using the intensity-type demodulation scheme, it faces problems such as low sensitivity and unstable demodulated signal; the existing phase generation carrier technology faces the problem of low ability to couple the reflected light of the diaphragm to the optical fiber, which seriously affects the interference efficiency of the interferometer

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