Pine tree-shaped metal nano-grating

A metal nanotechnology, pine tree technology, applied in nanotechnology, nanotechnology, diffraction grating, etc., can solve the problems of large structure size, difficult three-dimensional gold nanostructure, limited application and development, etc., to achieve the effect of expanding the range and realizing broadband absorption

Active Publication Date: 2018-11-13
TSINGHUA UNIV +1
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Problems solved by technology

Focused Ion Beam Induced Etching (FIBIE) is also one of the dry etching techniques for preparing three-dimensional nanostructures, but it can only be etched in a certain direction, such as ...

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  • Pine tree-shaped metal nano-grating
  • Pine tree-shaped metal nano-grating
  • Pine tree-shaped metal nano-grating

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preparation example Construction

[0031] see Figure 5 , the first embodiment of the present invention provides a method for preparing the pine-like metal nano-grating 10 . The preparation method of the pine-like metal nano-grating 10 comprises the following steps:

[0032]S10: providing a substrate 100;

[0033] S20: disposing a first metal layer 120 on the surface of the substrate 100, disposing an isolation layer 130 on the surface of the first metal layer 120 away from the substrate 100, and disposing an isolation layer 130 on the surface of the isolation layer 130 away from the first metal layer 120 setting a second metal layer 140;

[0034] S30: disposing a patterned first mask layer 151 on the surface of the second metal layer 140 away from the isolation layer 130, the patterned first mask layer 151 covering a partial area of ​​the surface of the second metal layer 140 , and expose the rest of the area;

[0035] S40: Etching the second metal layer 140 to obtain a plurality of parallel and spaced tri...

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Abstract

The present invention relates to a pine tree-shaped metal nano-grating. The pine tree-shaped metal nano-grating comprises a substrate and a plurality of three-dimensional nanostructures distributed inan array on the surface of the substrate; the three-dimensional nanostructure comprises a first cuboid structure, a second cuboid structure, and a triangular prism structure, wherein the first cuboidstructure is disposed on a surface of the substrate, the second cuboid structure is disposed on a surface of the first cuboid structure which is far away from the substrate, and the triangular prismstructure is disposed on a surface of the second cuboid structure which is far away from the first cuboid structure, the width of the bottom surface of the triangular prism structure is equal to the width of the upper surface of the second cuboid structure and is greater than the width of the upper surface of the first cuboid structure, and each of the first cuboid structure and the triangular prism structure is a metal layer.

Description

technical field [0001] The invention relates to the technical field of micro-nano processing, in particular to a pine-like metal nano-grating and a preparation method thereof. Background technique [0002] The nanostructures of gold and silver have important applications in many fields, such as nano-optics, biochemical sensors, precision optical instruments for ultra-high resolution imaging, surface plasmons and surface plasmon lithography, etc., which strictly rely on gold nanostructures. Researchers prepare gold and silver nanostructures mostly through Lift-off process, FIB milling or electrochemistry. However, these schemes either lead to unsatisfactory structural properties due to the introduction of chemical reagents, or it is difficult to achieve specific shapes and very small nanostructures. It is very challenging to prepare gold and silver nanostructures with a certain shape. [0003] In the processing of nanostructures, chemical etching depends on the chemical pro...

Claims

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Application Information

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IPC IPC(8): G02B5/18B82Y30/00
CPCB82Y30/00G02B5/18G02B5/1857C23F1/02G02B5/1809G02B2207/101G03F7/0002C23F4/00
Inventor 朱振东李群庆范守善
Owner TSINGHUA UNIV
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