Substrate frame conveying system of vacuum film plating machine
A technology of vacuum coating and rack transfer, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc. It can solve the problems of increasing the number of vacuum pumping systems and increasing the number of vacuum chambers, so as to improve production efficiency and shorten the production time. Effect of length and space reduction
Pending Publication Date: 2018-11-23
湖南玉丰真空科学技术有限公司
View PDF13 Cites 1 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
There are currently two transmission methods used for the transmission of coated glass, one is the linear transmission method, one end enters the other end, and the other adopts the return transmission mode, the entry and exit are at the same end, but the transmission of these two modes The entry and exit of the substrate is completed in different vacuum chambers, which increases the number of vacuum chambers and the corresponding vacuum pumping system will increase significantly
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] In order to facilitate the understanding of the present invention, the present invention will be described more fully and in detail below in conjunction with the accompanying drawings and preferred embodiments, but the protection scope of the present invention is not limited to the following specific embodiments.
[0028] A substrate rack conveying system for a vacuum coating machine is characterized in that it includes a mechanical translation mechanism, a magnetic guide translation mechanism, a lifting mechanism, and a control module.
[0029] The mechanical translation mechanism includes a plurality of transmission rods I201 transversely passing through the side plates on both sides of the vacuum chamber. The two ends of the transmission rods I201 are respectively installed on two mounting plates I203. The sealing device 205 is connected, and the transmission rod I201 between the vacuum chamber and the installation plate I203 is covered with a bellows 103. A synchron...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a substrate frame conveying system of a vacuum film plating machine. The substrate frame conveying system comprises a mechanical translation mechanism, a magnetic guide translation mechanism, a lifting mechanism and a control module, wherein the mechanical translation mechanism comprises a drive rod I, an installation plate I and a translation motor I, the drive rod I is connected with a drive motor, the installation plate I is connected with both ends of the drive rod I, and the translation motor I is connected with the installation plate I; the magnetic guide translation mechanism comprises a magnetic guide device, clamps and an installation plate II, the magnetic guide device is fixedly arranged on the connecting rod, the clamps are arranged at both ends of the magnetic guide device, and the installation plate II is driven by a translation motor II; the lifting mechanism comprises two air cylinders and end plates, the two air cylinders are fixedly arranged under a bottom plate of a vacuum chamber, each end plate is connected with the corresponding air cylinder, and support seats are respectively arranged at the two ends of each end plate, respectively extend into the vacuum chamber, and are used for jacking the substrate frame. The substrate frame conveying system has the advantages that the translation interchange function of the multiple substrate frames under the single-box vacuum environment is solved, the independent conveying of each substrate frame is realized, the length of the whole vacuum equipment is shortened, the production efficiencyis improved, the whole working process is performed under the vacuum environment, and the change of vacuum degree is not caused.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a substrate frame conveying system of a vacuum coating machine. Background technique [0002] The vacuum coating production line has multiple vacuum boxes distributed on the same horizontal plane. The glass to be coated is transported by the conveyor and processed by each vacuum box to achieve surface coating. There are currently two transmission methods used for the transmission of coated glass, one is the linear transmission method, one end enters the other end, and the other adopts the return transmission mode, the entry and exit are at the same end, but the transmission of these two modes The entry and exit of the substrate is completed in different vacuum chambers, which increases the number of vacuum chambers and the corresponding vacuum pumping system will increase significantly. Contents of the invention [0003] Aiming at the above-mentioned technical problems ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56
CPCC23C14/568
Inventor 刘光斗舒逸李赞
Owner 湖南玉丰真空科学技术有限公司