Substrate frame conveying device in vacuum chamber of vacuum coating machine

Abstract

The invention discloses a substrate frame conveying device in a vacuum chamber of a vacuum coating machine. The substrate frame conveying device comprises a conveying mechanism and a translating mechanism, wherein the conveying mechanism comprises a plurality of transmission rods which pass through side plates on both sides of the vacuum chamber, both ends of the transmission rods are respectivelyinstalled on two mounting plates, corrugated pipes sleeve the transmission rods outside the vacuum chamber, synchronous belt wheels are installed on the tail end of one end of the transmission rods,the synchronous belt wheels on the two adjacent transmission rods are oppositely installed, motors on the two mounting plates are connected with the synchronous belt wheels on the transmission rods onthe same side by virtue of synchronous belts, friction wheels are installed on the transmission rods in the vacuum chamber, the friction wheels on the two adjacent transmission rods are staggered, the translating mechanism comprises a translating motor, a lead screw, a lead screw nut and a translating guide device, the translating motor is connected with the lead screw by virtue of a synchronousbelt, and the lead screw nut is connected with the mounting plates by virtue of connecting rods. According to the substrate frame conveying device, a plurality of substrate frames can be conveyed backand forth in the same vacuum chamber environment, so that the length of vacuum equipment is reduced, and the production efficiency is improved.

Description

Technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a substrate rack conveying device in the vacuum chamber of a vacuum coating machine. Background technique [0002] The vacuum coating production line is distributed with multiple vacuum boxes on the same horizontal plane. The coated glass is transported by the conveyor and processed by each vacuum box to achieve surface coating. There are currently two transmission methods used for glass-plated transmission. One is linear transmission with one end in and one end, and the other is in backhaul mode, both in and out at the same end, but these two modes transmit The substrate entry and exit are completed in different vacuum chambers, so that the number of vacuum chambers increases, and the corresponding vacuum pumping system will increase significantly. Summary of the invention [0003] In view of the above-mentioned technical problems in the prior art, the present invention provid...

AI Technical Summary

Problems solved by technology

There are currently two transmission methods used for the transmission of coated glass, one is the linear transmission method, one end enters the other end, and the other adopts the return transmission mode, the entry and exit are at the same end, but the transmission of these two modes The entry and exit of the substrate is completed in different vacuum chambers, which increases the number of vacuum chambers and the corresponding vacuum pumping system will increase significantly

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