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A mask plate and evaporation equipment

A mask and template technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve problems such as poor evaporation such as color mixing

Active Publication Date: 2020-07-17
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide a mask plate and evaporation equipment, which can improve the problem of poor evaporation such as color mixing in the evaporation mask plate in the prior art

Method used

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  • A mask plate and evaporation equipment
  • A mask plate and evaporation equipment
  • A mask plate and evaporation equipment

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Embodiment Construction

[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention belong to the protection scope of the present invention.

[0032] In view of the problem of poor evaporation such as color mixing in the evaporation mask in the prior art, an embodiment of the present invention provides a mask and evaporation equipment, which can improve the problem of poor evaporation such as color mixing.

[0033] Such as figure 1 and figure 2 As shown, the mask plate provided by the embodiment of the present invention is used for ev...

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Abstract

The invention provides a mask plate and evaporation equipment. The mask plate comprises a first mask plate and a second mask plate, wherein the first mask plate is provided with a plurality of pixel openings and comprises a first preset area and a second preset area; the second mask plate is placed at one side of the first mask plate in a stacking way, and comprises a first projection area and a second projection area; the plurality of pixel openings are divided into at least one first sub-area in the first preset area, the second mask is provided with first opening parts in the first projection region, the first sub-areas just face the at least one first opening part, and the orthographic projections of the first opening parts on the first mask plate fall into the corresponding first sub-areas; the plurality of pixel openings are divided into a plurality of second sub-areas at the second preset area, and the second mask plate is provided with a plurality of second opening parts in thesecond projection area, each second sub-area just faces the corresponding second opening part, and the orthographic projections of the second sub-areas on the second mask plate fall into the corresponding second opening parts. The mask plate and the evaporation equipment can reduce color mixing defects during evaporation.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate and evaporation equipment. Background technique [0002] In the OLED (Organic Light Emission Display, organic electroluminescent diode) manufacturing technology, the mask used for vacuum evaporation is a crucial component, and the quality of the mask directly affects the manufacturing cost and product quality. Among the masks used in the OLED evaporation process, the Fine Metal Mask (FMM) is one of the most critical equipment. FMM is used to evaporate light-emitting layer materials to form pixel patterns on the backplane. Therefore, the quality of FMM is directly related to the display effect of the screen. [0003] With the rapid development of AMOLED (Active-matrix organic light emitting diode, active-matrix organic light-emitting diode or active-matrix organic light-emitting diode) display screen, it has been applied to various fields of people's life, especiall...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 郝志元
Owner BOE TECH GRP CO LTD