Method for measuring displacement of nano-grating 0-level detection based on circulator

Abstract

The invention relates to the technical field of displacement measurement, and more particularly to a method for measuring displacement of nano-grating 0-level detection based on a circulator. A 0-order diffracted light directly reflected by a nano-grating and a 0-order diffracted light reflected back through a mirror are measured by an interference signal to realize a common light path between theincident light and the detection light; a method for detecting the 0-order diffracted light is adopted to improve the light energy utilization rate and photoelectric detection sensitivity; a method of a fiber optic circulator for realizing a common light path between the incident light and the detection light is combined to implement convenience and effectively eliminate the influence of stray light; by adding a piezoelectric ceramic driver at the grating to make sinusoidal modulation of the driver and through phase-locked magnified one-frequency and double-frequency signals, the high-precision and high-sensitivity measurement of displacement is realized, and the influence of background noise and laser intensity fluctuation on the measurement is eliminated; the amplitudes of the phase-locked one-frequency and double-frequency signals are divided to eliminate the problem of the decrease of the displacement measurement accuracy caused by the laser light intensity fluctuation.

Description

technical field [0001] The invention relates to the technical field of high-precision displacement measurement, and more specifically relates to a measurement method for zero-level detection displacement of a nano-grating based on a circulator. Background technique [0002] With the rapid development of some cutting-edge technologies, in the fields of manufacturing, microelectronics, biology, and aerospace, especially in high-precision gyroscopes and accelerometers, there is an urgent need for high-precision, high-sensitivity displacement measurement systems. Among them, the grating detection method has the advantages of high precision, small size, light weight, etc., and is widely used. There are two main types of grating displacement sensors, one is based on the principle of double-grating moiré fringe detection, and the other is based on single-grating plus The grating diffraction principle and interference principle of the reflective structure. The single grating structu...

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the deficiencies in the prior art, the present invention provides a measurement method based on a circulator-based nano-grating 0-order detection displacement. For the existing existing grating displacement sensors, the diffr...

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