Integrated chromatic confocal sensor

A color confocal and color technology, applied in the field of multi-channel color confocal sensors, can solve problems such as difficulty in using a large number of channels, measurement introduction deviation, and coupling ratio dependence

Active Publication Date: 2018-12-21
UNITY SEMICON
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] - they are difficult to use for a large number of channels;
[0015] - Since its operating principle utilizes mode coupling between fiber cores, its coupling ratio is very wavelength dependent, which can introduce bias in the measurement

Method used

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  • Integrated chromatic confocal sensor
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Embodiment Construction

[0101] It should be understood that the embodiments described below are by no means limiting. In particular, variants of the invention are conceivable comprising only a selection of the features described below, but not other features described, as long as this selection of features is sufficient to confer a technical advantage or to distinguish the invention from the prior art. The selection includes at least one (preferably functional) feature with no structural details or with only a part of the structural details which alone are sufficient to confer a technical advantage or to distinguish the invention from the prior art.

[0102] In particular, all variants and embodiments described can be combined, as long as such a combination is not excluded from a technical point of view.

[0103] In the figures, elements common to several figures are provided with the same reference numerals.

[0104] refer to figure 1 and figure 2 , we will describe the chromatic confocal setup ...

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Abstract

The present invention concerns a confocal chromatic device, comprising : at least one chromatic lens (13) with an extended axial chromatism; at least one broadband light source (19); at least one optical detection means (20, 21); and at least one measurement channel (24) with a planar Y-junction (18) made with a planar waveguide optics technology, and arranged for transferring light from said at least one light source (19) towards said at least one chromatic lens (13) and for transferring light reflected back through said at least one chromatic lens (13) towards said at least one optical detection means (20, 21).

Description

technical field [0001] The invention relates to a multi-channel color confocal sensor. [0002] The field of the invention is but not limited to 2D-3D detection and metrology systems. Background technique [0003] Chromatic confocal technology is a well-known technique used for three-dimensional (3D) surface mapping and thickness measurement in semiconductor or other industrial applications. [0004] The technique relies on the use of chromatic lenses with enhanced chromatic aberration, the focal length of which is highly dependent on the optical wavelength. Each wavelength of light passing through such a lens is focused at a different distance, or on a different focal plane. [0005] The colored lenses are embedded in a confocal setup where the light source and detection aperture are placed at the confocal plane of the colored lenses in order to reject out-of-focus light. When a reflective interface is placed in front of the colored lens, only light with a wavelength who...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G02B21/00G01N21/956H01L21/66
CPCG01B11/0608G01B11/22G01B11/245G01B2210/50G01B2210/56G01N21/8806G01N21/9501G01N21/956G02B21/0064H01L22/12G01J3/0208G01J3/0218G01J3/18G01J3/453G01N21/8851G01N2201/063G01N2201/0833G01N2201/105G01B11/022
Inventor 菲利普·加斯塔尔多
Owner UNITY SEMICON
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