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A double-sided perc solar cell structure and its preparation process

A technology for solar cells and fabrication processes, applied in sustainable manufacturing/processing, circuits, electrical components, etc., can solve problems that affect the front conversion efficiency of cells, increase the LID and PID risks of cells and components, and achieve bifacial ratio and Improved anti-LID effect, double-sided ratio and anti-LID effect, improved anti-reflection effect

Active Publication Date: 2020-07-17
HENGDIAN GRP DMEGC MAGNETICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to improve the power generation effect on the back of the battery, it is necessary to reduce the thickness of the passivation layer on the back. At the same time, the back is printed with Al grid lines, which affects the front conversion efficiency of the battery; the structure of the double-sided battery also increases the risk of LID and PID of the battery and modules.

Method used

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  • A double-sided perc solar cell structure and its preparation process
  • A double-sided perc solar cell structure and its preparation process
  • A double-sided perc solar cell structure and its preparation process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] refer to figure 1 , a bifacial PERC solar cell structure with SiO on the front and back of the cell 2 / AlOx / SiNx / SiNy / SiOxNy / SiOx stacked structure, where the front and back SiO 2 layer is simultaneously formed by thermal oxidation or ozone oxidation, SiO 2 Layer thickness 5-20nm; front and back AlOx(Al 2 o 3 ) layer is formed by simultaneous deposition of atomic layer deposition (ALD), the AlOx layer thickness is 3-30nm, and the refractive index is 1.60-1.65; or a combination of two or more) are formed by PECVD deposition respectively, the thickness of the front SiNx / SiNy / SiOxNy / SiOx stack is 5-20nm, 20-40nm, 30-50nm and 40-60nm respectively, and the total thickness of the stack is 80-90nm , the refractive indices are 2.0-2.3, 1.8-2.0, 1.6-1.9 and 1.4-1.6 respectively; the backside SiNx / SiNy / SiOxNy / SiOx stack thicknesses are 15-30nm, 30-60nm, 40-70nm and 60-90nm respectively, The total thickness of the stack is 80-160nm, and the refractive indices are 2.0-2.3, 1.8...

Embodiment 2

[0040] In the third step of embodiment 1, the belt speed of back chain etching is 1.5m / min, the etching depth is 5um, and the reflectivity of the back surface is 40%; other processes are the same as in embodiment 1.

Embodiment 3

[0042] In the 5th step in embodiment 1, ALD deposits, deposits Al simultaneously on both sides 2 o 3 , the deposition temperature is 250° C., the pressure is 100 mTor, and the time is 400 s; other processes are the same as in Example 1.

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Abstract

The invention provides a novel double-sided PERC battery structure and a preparation process thereof. The front and back passivation layers of the battery are symmetrical, which greatly reduces the warpage of the double-sided battery and improves the mechanical load strength of the module. On the basis of ensuring the anti-PID performance of the battery, the laminated passivation structure adoptsa unique surface passivation layer deposition process to optimize the optical (anti-reflection effect) and electrical (hydrogen passivation effect) performance of the front and back surfaces, and to achieve the improvement and enhancement of the front conversion efficiency, double-sided ratio and anti-LID effect of the battery. The double-sided PERC battery process adopted by the invention The SiO2 and AlOx layers on the front and back sides are formed simultaneously by thermal oxidation and ALD respectively, and the SiNx / SiNy / SiOxNy / SiOx layers on the front and back sides are formed by PECVDdeposition respectively. The deposition order of the front and back sides can be adjusted.

Description

technical field [0001] The invention relates to a double-sided PERC solar cell structure and a preparation process thereof, belonging to the field of crystalline silicon solar cell manufacturing. Background technique [0002] On the basis of single-sided PERC cells, the preparation of double-sided PERC cells can be achieved by making certain adjustments to the back passivation, laser window opening, printing and high-temperature sintering processes. In order to improve the power generation effect on the back of the battery, it is necessary to reduce the thickness of the passivation layer on the back. At the same time, the back is printed with Al grid lines, which affects the front conversion efficiency of the battery; the structure of the double-sided battery also increases the risk of LID and PID of the battery and modules. . Contents of the invention [0003] The present invention proposes a novel double-sided PERC battery structure and its preparation process. A symmet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0216H01L31/068H01L31/18
CPCH01L31/02167H01L31/02168H01L31/0684H01L31/1804H01L31/1868Y02E10/547Y02P70/50
Inventor 陈健生王永楠
Owner HENGDIAN GRP DMEGC MAGNETICS CO LTD
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