This application provides a
passivation structure and its preparation method, as well as a
silicon solar cell and its preparation method. The
passivation structure includes a first aluminum
oxide layer, a first aluminum
nitride layer, a second aluminum
oxide layer, and a second aluminum
nitride layer stacked together. The first aluminum
oxide layer directly contacts the
silicon edge and repairs
cutting damage and dangling bonds through chemical
passivation. It adapts to the p-type
silicon region with a negative
fixed charge. The first aluminum
nitride layer passivates the n-type silicon with a positive
fixed charge. The high
hydrogen content enhances
defect repair, and the dense structure blocks impurities from intruding. The second aluminum oxide layer supplements the
negative charge to improve the passivation effect of the p-type silicon and forms stress complementarity with the aluminum nitride layer to prevent film
cracking. The second aluminum nitride layer resists stringing and lamination damage, blocks
moisture and
corrosion, and ensures long-term performance. This structure achieves optimal simultaneous passivation of p / n-type silicon through charge complementarity and synergistic
hydrogen passivation, improving the minority
carrier lifetime at the
cell edge, the implicit open-circuit
voltage, and the module power, and solving the pain points of incomplete passivation and poor stability.