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Capacitive flexible pressure sensor and preparation method thereof

A pressure sensor and capacitive technology, applied in the field of capacitive flexible pressure sensor and its preparation, can solve the problems of high cost, inability to bend sensitivity, etc., and achieve the effects of high sensitivity, increased sensitivity, and easy arraying

Pending Publication Date: 2019-01-01
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But at present, there are still some problems with capacitive pressure sensors. Traditional pressure sensors cannot be bent or have low sensitivity and high cost under bending conditions.

Method used

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  • Capacitive flexible pressure sensor and preparation method thereof
  • Capacitive flexible pressure sensor and preparation method thereof
  • Capacitive flexible pressure sensor and preparation method thereof

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Embodiment Construction

[0029] Embodiments of the present invention will be described in detail below. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0030] refer to Figure 1 to Figure 4 , in one embodiment, a capacitive flexible pressure sensor comprises an ITO electrode plate 1, an insulating film 2 and a polymer elastomer electrode 3; the polymer elastomer electrode 3 comprises a conductive film 31, a polymer elastic body 32 and an electrode substrate 33, the polymer elastomer 32 includes a microstructure layer with a microstructure protrusion array formed on the electrode substrate 33, the conductive film 31 is evenly coated on the microstructure The surface of the layer; the insulating layer film 2 is placed between the polymer elastomer electrode 3 and the ITO electrode plate, and is in contact with the top of the microstructure protrusion of the microstructure layer through the conductive fi...

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Abstract

The invention relates to a capacitive flexible pressure sensor and a preparation method thereof. The capacitive flexible pressure sensor comprises a polymer elastomer electrode, an insulating layer film and an ITO electrode; the polymer elastomer electrode comprises a conductive film, a polymer elastomer and an electrode substrate, wherein the polymer elastomer comprises a microstructure layer which is formed on the electrode substrate and has a microstructure bump array, and the conductive film covers the surface of the microstructure layer; the insulating layer film is arranged between the polymer elastomer electrode and the ITO electrode, and contacts the tops of the microstructure bumps of the microstructure layer through the conductive film. The capacitive flexible pressure sensor andthe preparation method thereof of the invention have the advantages of high sensitivity and good device stability.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a capacitive flexible pressure sensor and a preparation method thereof. Background technique [0002] As an emerging technology field, flexible electronics has been selected as "one of the world's top ten scientific and technological achievements". In the era of Industry 4.0 and Made in China 2025, everything is interconnected, and expectations for the range, accuracy, scene, stability, and performance parameters of perceived information are gradually increasing. Traditional silicon-based electronic devices are difficult to meet social needs. In addition, humans and other creatures are flexible bodies, which are more suitable for flexible devices, and are also one of the elements driven by flexible electronics. The so-called flexible electronics refers to the electronic technology in which organic / inorganic thin film electronic devices are processed and manufactured on ...

Claims

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Application Information

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IPC IPC(8): G01L1/14
CPCG01L1/142
Inventor 张旻李萌萌王旭东
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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