A method and system for restoring the surface geometry of a concave area of an object
A surface geometry and object surface technology, applied in the field of atomic force microscopy, can solve the problems of surface scanning accuracy decline, image distortion, not vertical height, etc.
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[0056] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0057] The invention provides a method and system for restoring the surface geometric appearance of the concave area of an object. The purpose is to establish an interaction model between the tip of an atomic force microscope with an arbitrary shape and the object to be measured, and to use a rotating tip to measure method to improve the image precision of the atomic force microscope in the concave area of the surface.
[0058] In order to make the above o...
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