Push-pull fully differential single-axis silicon microresonant accelerometer
An accelerometer and resonant technology, which is applied in the field of push-pull fully differential single-axis silicon microresonant accelerometer, can solve the problem of inconsistent force of differential resonant acceleration sensor
Active Publication Date: 2020-10-27
ZHONGBEI UNIV +1
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Problems solved by technology
[0003] The present invention solves the problem of inconsistency in the force of the existing differential resonant acceleration sensor, and provides a push-pull fully differential single-axis silicon micro-resonant accelerometer
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[0011] The push-pull fully differential uniaxial silicon microresonant accelerometer includes an outer frame 1 with an axisymmetric structure, and the outer frame 1 is provided with a symmetrical mass block 2 along the symmetrical axis of the outer frame 1, and the mass block 2 and The outer frame 1 is connected by a plurality of pairs of folded beams 3 symmetrically distributed along the symmetry axis of the outer frame 1; the mass block 2 is hollowed out with a connecting beam 4, two DETF resonators 5, four lever mechanisms, and eight Fixed anchor point 6, twelve connecting arms 7, the length direction of the connecting beam 4 is set along the vertical direction of the symmetry axis of the outer frame 1, and is symmetrical about the symmetry axis; the DETF resonator 5 is arranged along the outer frame 1 The symmetrical axis direction is arranged on both sides of the width direction of the connecting beam 4, one end is connected with the midpoint of the connecting beam 4 in th...
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The invention relates to an MEMS resonant acceleration sensor, in particular to a push-and-pull full-differential single-shaft silicon micro-resonant accelerometer. By the push-and-pull full-differential single-shaft silicon micro-resonant accelerometer, the problem of structure redundancy of a traditional MEMS resonant acceleration sensor is solved. The push-and-pull full-differential single-shaft silicon micro-resonant accelerometer comprises an external frame, wherein a mass block is arranged in the external frame, a connection beam, a DETF resonator, a fixed anchoring point and a lever mechanism are arranged on the mass block in a hollow way, the connection beam is perpendicular to a symmetric axis, and the DETF resonator, the fixed anchoring point and the lever mechanism are symmetricalong a symmetric center. The push-and-pull full-differential single-shaft silicon micro-resonant accelerometer has the advantages of ingenious structure, forces applied onto the resonators are equalby a lever, and the problem that output forces of the lever mechanism are not consistent due to a structure processing error is prevented; by the structure, differential output of a frequency is achieved, the differential output of an amplification inertia force of the lever mechanism is achieved, pull stress is applied to one side of the connection beam and press stress is applied to the other side of the connection beam by two groups of separated primary levers acting onto the connection beam, and the amplification of a driving force of the connection beam is effectively achieved.
Description
technical field [0001] The invention relates to a MEMS (micro-electromechanical system) resonant acceleration sensor, in particular to a push-pull full differential single-axis silicon micro-resonant accelerometer. Background technique [0002] Micromechanical resonant acceleration sensor (MMRA) is a typical micromechanical inertial device based on a resonator, which can convert acceleration into frequency output, effectively avoiding the error of amplitude measurement, thereby reducing the interference caused by environmental noise , due to its quasi-digital output, it can simplify the interface circuit and reduce the error of transmission and processing. Of course, it has the characteristics of small size, light weight, low power consumption, low cost, easy integration and mass production of the micromachined accelerometer. The resonant acceleration sensor can be widely used in aerospace, weapon guidance, medical medicine and other fields, and it is a high-precision accel...
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IPC IPC(8): G01P15/02
CPCG01P15/02
Inventor 石云波刘俊唐军曹慧亮白桦李杰赵锐高晋阳郭涛李飞赵思晗赵永祺王彦林焦静静张英杰寇志伟许鑫
Owner ZHONGBEI UNIV