An Absolute Time Grating Angular Displacement Sensor Based on Alternating Electric Field

Abstract

The invention discloses an absolute time grating angular displacement sensor based on an alternating electric field, which includes a rotor base body and a stator base body. The lower surface of the rotor base body is provided with a reflection electrode I, an induction electrode, and a reflection electrode II, and the reflection electrodes I and II are respectively connected to the The sensing electrodes are connected; the upper surface of the stator base is provided with a receiving electrode I, an exciting electrode and a receiving electrode II. Electrode II outputs the second precise sine wave signal, and uses the phase difference between the first and second precise sine wave signals to calculate the coarse antipolar positioning value, and uses the first or second precise sine wave signal The wave signal is used to calculate the precise angular displacement value, and the absolute angular displacement value is obtained by combining the precise angular displacement value with the rough measurement pole positioning value. The sensor can realize the absolute angular displacement measurement, expand the application range and enhance the industrial adaptability at the same time.

Description

technical field [0001] The invention relates to a precision angular displacement sensor, in particular to an absolute time grating angular displacement sensor based on an alternating electric field. Background technique [0002] Traditional precision displacement measurement mainly uses grating sensors such as gratings, magnetic gratings, and capacitive gratings. The measurement standard uses periodic grating lines that are equally divided in space, and the angular displacement is obtained by counting the grating lines. In order to improve the measurement accuracy and resolution, these grid sensors use precise scribing lines and need to rely on high-precision electronic subdivision technology, complex and harsh scribing process and electronic subdivision circuit, resulting in high cost of the sensor and poor anti-interference ability . In recent years, a time grating sensor with clock pulse as the reference for displacement measurement has been developed, and on this basis,...

AI Technical Summary

Problems solved by technology

In order to improve the measurement accuracy and resolution, these grid sensors use precise scribing lines and need to rely on high-precision electronic subdivision technology, complex and harsh scribing process and electronic subdivision circuit, resulting in high cost of the sensor and poor anti-interference ability

In recent years, a time grating sensor with clock pulse as the reference for displacement measurement has been developed, and on this basis, an electric field type time grating angular displacement sensor (public number CN103968750A) has been developed. This sensor uses high frequency clock pulse As a measurement benchmark, parallel capacitor plates are used to construct an alternating electric field for precise displacement measurement. Although precise measurement can be achieved, there are still the following problems: (1) Incremental counting method has cumulative errors and can only identify displacements within one cycle. Angular displacement; (2) The induction signal is output from the rotor electrodes on the rotor base, and the rotor base needs a lead signal output line, which cannot be used in some occasions and has a narrow application range

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