A Flexible Thin Film Acoustic Vector Sensor Based on Nanomaterials
A sound vector sensor, flexible film technology, applied in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc., to achieve the effects of simple operation, good stability and low cost
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[0040] Such as Figure 1-5 as shown,
[0041] A flexible thin-film acoustic vector sensor based on nanomaterials, comprising: a flexible thin-film structure, a conductive nanomaterial unit 1, electrodes, and a rigid bottom plate with holes 2;
[0042] The flexible membrane structure includes an outer ring 3, an inner mass block 4 and several beams 5, and the outer ring 3 and the inner mass block 4 are connected by the beams 5; The outer ring 3; the upper part of the beam 5 is provided with a fixed end of the first electrode 6 and a fixed end of the second electrode 7, and the upper part of the fixed end of the first electrode 6 and the fixed end of the second electrode 7 is covered with a conductive nanomaterial unit 1. The lead-out end of the first electrode 6 is led out from the upper part of the rigid base plate 2 , and the lead-out end of the second electrode 7 is drawn out from the lower part of the rigid base plate 2 .
[0043] Such as Figure 5 As shown, each of the ...
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