The invention discloses a novel MEMS bionic
acoustic vector sensor structure, which belongs to the field of
acoustics. Moveable comb teeth 6 are arranged on a left vibrating diaphragm 1 and a right vibrating diaphragm 2 of the novel MEMS bionic
acoustic vector sensor structure, and form comb tooth pairs with fixed comb teeth 7 which are connected in an anchoring area 9. By adopting a comb tooth pair structure, the defect that the conventional structure cannot detect
capacitance due to existence of reinforcing ribs is remedied, so that a vibrating amplitude curve can be detected by detecting the
capacitance change, the amplitudes and damping of a first-order
modal frequency and a second-order
modal frequency can be sequentially computed, an acoustic pressure value is tested by a testing
microphone beside an apparatus, and an incidence angle of
sound wave is computed for positioning an acoustic source. The invention also discloses a manufacturing method for the novel MEMS bionic
acoustic vector sensor structure. When an SOG technology is used for
etching a fluid clearance on glass, the technology is simple and the clearance depth is controllable, so that a footing effect generated in the deeply
etching process in an ICP technology is avoided, the
manufacturing technology is optimized, and the structural precision and the
yield rate of apparatus are improved.