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Optical system for checking ultra large diameter convex parabolic mirror

A technology of parabolic mirror and optical system, which is applied in the field of optical system inspection of super-large-diameter convex parabolic mirrors, can solve the problems that cannot meet the increasing diameter of aspheric mirrors, and achieve the effect of reducing the diameter and

Inactive Publication Date: 2019-01-22
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

For the above reasons, this method cannot meet the needs of the increasing diameter of aspheric mirrors

Method used

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  • Optical system for checking ultra large diameter convex parabolic mirror
  • Optical system for checking ultra large diameter convex parabolic mirror

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Embodiment Construction

[0011] Hereinafter, the present invention will be further described through the description of the embodiments and the accompanying drawings.

[0012] It is known that the diameter of the convex parabolic mirror to be tested is 600 mm, the radius of curvature is 1.8 m, and the eccentricity is 1. The optical system for inspecting the parabolic reflector is composed of a laser interferometer, a compensation lens group, a parabolic reflector to be inspected and an auxiliary reflector. The ratio of the caliber of the auxiliary reflector to the caliber of the parabolic reflector to be tested is 2, and the ratio of the compensation lens group to the caliber of the parabolic reflector to be tested is 0.1.

[0013] In order to reduce the aperture of the auxiliary reflector, it is necessary to reduce the distance between it and the convex parabolic reflector to be tested. At the same time, in order to avoid blocking the light path, the light path reflected by the parabolic reflector i...

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Abstract

The invention discloses an optical system for checking an ultra large diameter convex parabolic mirror. The detection optical system is composed of a laser interferometer, a compensation lens group, ato-be-detected convex parabolic mirror and a spherical mirror. A sphere centre of the spherical mirror is located on a rear focus of the detected convex parabolic mirror. Divergent light emitted by the laser interferometer is incident from a central hole of the detected convex parabolic mirror and is incident on the spherical mirror through refraction of the compensation lens group. Light reflected by the spherical mirror is incident on the spherical mirror again along a normal direction through reflection of the detected convex parabolic mirror and returns to the laser interferometer according to an original path through self-collimating reflection. The system has the advantages that high precision detection of the ultra large diameter convex parabolic mirrors with diameters of 600mm orabove can be realized, detection precision is ensured, and the diameter of an auxiliary spherical surface and length of the system can be reduced.

Description

technical field [0001] The invention relates to an optical system for inspecting an aspheric surface, in particular to an optical system for inspecting a super-large diameter convex parabolic reflector. Background technique [0002] Aspheric mirrors have good optical properties. By using aspherical mirrors in the optical system, the number of lenses in the system can be reduced while improving the imaging quality. Among them, the parabolic mirror can perfectly image the object at infinity. There are many applications in space detectors, large-diameter collimators, and laser beam expanders. In order to obtain a better imaging effect, parabolic reflectors with large aperture and large relative aperture have been used more and more. Aspheric surface inspection is an important part of aspheric surface processing. At present, commonly used methods in aspheric surface inspection include zero compensation inspection, Hindle inspection, and holographic inspection. But convex asp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00
CPCG01M11/00
Inventor 赵鹏玮郑列华叶璐
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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