Sensor for detecting acetone gas and preparation method
A sensor and sensor body technology, applied in the field of sensors, can solve the problems of deviation of detection results, difficulty in increasing the physical area of gas sensor, etc., and achieve the effect of improving measurement accuracy and increasing contact area
Pending Publication Date: 2019-01-25
NORTHEAST AGRICULTURAL UNIVERSITY +1
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Problems solved by technology
[0003] In the actual acetone detection process, the gas exhaled by the human body contains a large amount of carbon dioxide, water vapor and other impurities that easily interfere with the detection of acetone, resulting in deviations in the detection results. In addition, the difference between the gas and the gas sensor of the gas sensor The detection effect will be more accurate if the contact area is large and the contact is more sufficient. However, with the development of science and technology, the sensor gradually has a trend of miniaturization and refinement, and it is not easy to increase the physical area of the gas sensor.
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[0023] Such as Figure 1~Figure 5 As described above, a sensor for detecting acetone gas includes a sensor body 1 and a packaging shell 2; the sensor body 1 is fixed and packaged in the packaging shell 2, and the sensor for detecting acetone gas also includes an anti-interference device 3, and the anti-interference device 3 The interfering device 3 is arranged in the encapsulation shell 2 and is located at the vent hole 2-3 of the encapsulation shell 2, and is used to absorb interfering gas. Between the insulating layer 1-4 and the gas-sensitive layer 1-5 of the sensor body 1, multiple A ventilation cavity, the ventilation cavity can increase the contact area between the acetone gas and the gas-sensitive layer 1-5, so that the acetone gas can fully contact the gas-sensitive layer 1-5.
[0024] Such as figure 1 As shown, the sensor body 1 includes a substrate 1-1, a supporting layer 1-2, a heating layer 1-3, an insulating layer 1-4 and a gas-sensitive layer 1-5; the supporting...
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The invention discloses a sensor for detecting acetone gas and a preparation method, belongs to the technical field of sensors, and provides the sensor for detecting the acetone gas. The sensor can reduce interference gas and increase the contact area with detected gas. An anti-interference device is arranged in a package shell, located at a ventilation hole in the package shell, and used for absorbing the interference gas; a plurality of ventilation cavities are formed between an insulating layer and gas sensing layer of a sensor body, and the ventilation cavities can increase the contact area between the acetone gas and the gas sensing layer. The preparation method of the sensor for detecting the acetone gas comprises the steps that step 1, the sensor body is prepared, firstly SiO2 insulating film is formed on a support layer of a substrate; then a heating electrode and a detecting electrode are sputtered on the support layer; then the SiO2 insulating film is sputtered on the heatingelectrode and the detecting electrode to form the insulating layer, wherein the insulating layer is bonded to a silicon supporting plate, and the silicon supporting plate is bonded to a silicon wafer. The sensor for detecting the acetone gas and the preparation method improve the measurement accuracy of acetone.
Description
technical field [0001] The invention belongs to the technical field of sensors, in particular to a sensor for detecting acetone gas. Background technique [0002] With the improvement of people's living standards, population aging and lifestyle changes, diabetes is rapidly increasing. At present, China is facing a huge burden of diabetes. The prevalence of diabetes in its adults has reached 11.6%, and 50.1% of adults are pre-diabetic. Non-invasive diagnosis and monitoring of diabetes is a current research hotspot. Acetone in human exhaled breath is a potential biomarker for diabetes. Breath analysis technology, which non-invasively diagnoses clinical diseases or monitors human metabolic status by detecting the components of human exhaled breath, has opened up a new way for the diagnosis and monitoring of diabetes. [0003] In the actual acetone detection process, the gas exhaled by the human body contains a large amount of carbon dioxide, water vapor and other impurities ...
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Login to View More IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 谷俊涛孔庆明曲家兴孙威董守田
Owner NORTHEAST AGRICULTURAL UNIVERSITY