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Control method of wafer inflation loading platform

A control method and platform technology, applied in the direction of non-electric variable control, control/regulation system, and simultaneous control of multiple variables, etc., can solve the problems of inability to detect different types of carriers, inability to detect and control, and inability to flexibly use the process. Achieve stable and effective control

Inactive Publication Date: 2019-02-01
BRILLIAN NETWORK & AUTOMATION INTEGRATED SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Traditional wafer load platforms are sold with process equipment as a complete set of equipment. Therefore, the detection and control of wafer load must be used with original equipment, so most of them only have fairly basic control methods and cannot be implemented according to actual needs. detection and control, and cannot detect different types of carriers, so it cannot be flexibly used in the manufacturing process

Method used

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  • Control method of wafer inflation loading platform
  • Control method of wafer inflation loading platform
  • Control method of wafer inflation loading platform

Examples

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Embodiment Construction

[0020] Various exemplary embodiments will be described more fully hereinafter with reference to the accompanying drawings, in which some exemplary embodiments are shown. Inventive concepts may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the inventive concept to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like numbers indicate like components throughout.

[0021] It will be understood that although the terms first, second, third etc. may be used herein to describe various components, these components should not be limited by these terms. These terms are used to distinguish one component from another. Thus, a first component discussed below could be termed a second componen...

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Abstract

The invention discloses a control method of a wafer inflation loading platform. The control method comprises the steps of receiving an inflation command of a master control end; judging whether a carrier is arranged on the loading platform or not; opening a valve to execute inflation action; judging whether valve opening is succeed or not; reporting an event to the master control end if the valveopening is succeed; and waiting a valve closing command of the master control end. According to the control method of the wafer inflation loading platform, whether the carrier is arranged on the loading platform is determined by detecting sensing signals of a plurality of sensors; and by each sensor in a wafer loading platform system and a control device, stable and effective control is performedon an inflation system.

Description

technical field [0001] The invention relates to a method for controlling a wafer inflatable loading platform, in particular to a method for controlling a wafer loading platform controlled by various sensors. Background technique [0002] Traditional wafer load platforms are sold with process equipment as a complete set of equipment. Therefore, the detection and control of wafer load must be used with original equipment, so most of them only have fairly basic control methods and cannot be implemented according to actual needs. Detection and control are also unable to detect different types of carriers, and cannot be used flexibly in the manufacturing process. [0003] Therefore, it is an important subject in the industry to provide a control method for a wafer loading platform capable of effectively detecting various conditions of the inflation process. Contents of the invention [0004] In view of this, the embodiment of the present invention discloses a method for contro...

Claims

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Application Information

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IPC IPC(8): G05D27/02
CPCG05D27/02
Inventor 吕思纬陈勇州古伊钧林祺浩
Owner BRILLIAN NETWORK & AUTOMATION INTEGRATED SYST
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