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A mechanical dynamic model analysis method for flexible MEMS electrostatically actuate switches

An electrostatic drive, dynamic model technology, applied in the field of mechanical analysis, can solve problems such as blank

Active Publication Date: 2019-03-15
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, whether it is based on silicon-based or various types of flexible substrates, the main research content and purpose of RF MEMS flexible devices are still in the stage of device design, preparation and performance testing under non-bending conditions. The bending characteristics of RFMEMS flexible devices The research on modeling and experimental characterization verification is still blank

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  • A mechanical dynamic model analysis method for flexible MEMS electrostatically actuate switches
  • A mechanical dynamic model analysis method for flexible MEMS electrostatically actuate switches
  • A mechanical dynamic model analysis method for flexible MEMS electrostatically actuate switches

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Embodiment 1

[0044] The MEMS is a double-terminal fixed beam type RF MEMS. The material of the RF MEMS double-terminal fixed beam electrostatically driven switch beam is gold, and the flexible substrate material is liquid crystal polymer (LCP). The length of the beam is L=600μm, and the width of the beam is w = 100 μm, the thickness of the beam t = 2 μm, the initial distance between the upper and lower plates g = 2 μm, the Young’s modulus E of the beam = 78 Gpa, Poisson’s ratio n = 0.42. The above-mentioned RF MEMS double-terminal fixed beam electrostatic drive switch initially has biaxial residual compressive stress, the beam buckles upward, and the maximum buckling distance h=0.5μm, as the flexible substrate gradually bends, the curvature of the substrate gradually increases from 0 to 33.3m -1 , Apply a bias voltage of 1.4 times the threshold voltage between the upper and lower plates of the switch.

[0045] combine figure 1 This embodiment is described, specifically including the follo...

Embodiment 2

[0097]MEMS is a double-ended cantilever beam type RF MEMS. The material of the RF MEMS cantilever beam electrostatically driven switch beam is gold, and the flexible substrate material is liquid crystal polymer (LCP). The length of the beam is L=150μm, the width of the beam is w=100μm, and the The thickness t=2μm, the size of the lower plate is length L'=60μm; width w'=150μm, the thickness is determined by the thickness of the CPW transmission line. If the cantilever beam structure electrostatic actuator initially has a biaxial residual compressive stress of 2.5MPa, as the flexible substrate is gradually bent, the curvature of the substrate will gradually increase from 0 to 33.3m -1 , Apply a bias voltage of 1.4 times the threshold voltage between the upper and lower plates of the switch.

[0098] to combine figure 1 This embodiment is described, specifically including the following steps:

[0099] Step 1, establish the mechanical dynamic model of the RF MEMS electrostatic d...

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Abstract

A mechanical dynamic model analysis method for a flexible MEMS electrostatically actuate switch is provided in that patent, comprise the following steps of: establishing an initial mechanical dynamicmodel of the MEMS electrostatically actuate switch; The coupled deformation model of MEMS electrostatically actuated switch and flexible substrate is established. Obtaining the distance between the MEMS electrostatically driven switch membrane bridge and the flexible substrate after the flexible substrate is buckled and deformed; After the flexible substrate is buckled and deformed, parameter values after the flexible substrate is buckled and deformed are obtained; The mechanical dynamic model of the MEMS electrostatically actuated switch is reconstructed according to the parameter values of the flexible substrate after buckling deformation. Based on the reconstructed model, the influence of flexible substrate buckling on the mechanical dynamic model of MEMS electrostatically actuated switch is obtained, which fills in the blank of RF MEMS electrostatically actuated switch bending characteristic model at home and abroad.

Description

technical field [0001] The invention relates to a mechanical analysis method, in particular to a mechanical dynamic model analysis method of an RFMEMS electrostatic drive switch under the bending condition of a flexible substrate. Background technique [0002] In today's wave of information development, flexible electronic devices have very broad application prospects in the fields of national defense, information, medical treatment, and energy due to their unique bendability and high-efficiency and low-cost manufacturing processes. As a popular development direction of the new generation of semiconductor devices, flexible electronic devices are emerging electronic technologies based on bendable / extensible substrates, which fabricate active / passive organic / inorganic electronic devices on flexible substrates, which have the advantages of traditional rigid electronic systems. It also has the unique characteristics of stretching, twisting, and folding, so it has incomparable im...

Claims

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Application Information

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IPC IPC(8): G06F17/50
CPCG06F30/367Y02T90/00
Inventor 韩磊于洋吴虹剑田蕾吝晓楠
Owner SOUTHEAST UNIV