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Refrigeration type microscopic thermal imaging device and method with optical flat plate micro scanner

A technology of microscopic thermal imaging and optical flat panel, which is applied in the field of infrared thermal imaging, can solve problems such as microthermal analysis of high-resolution images, and achieve the effect of high spatial resolution and temperature resolution

Inactive Publication Date: 2019-03-19
YANSHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

This patented technology allows for better quality control during cryogenically cooled (C) observation without affecting its performance or requiring expensive equipment such as liquid nitrogen baths at high temperatures. It achieves this through combining different types of data from both visible light and invisible laser beams onto separate planes that can detect changes caused by specific objects being observed.

Problems solved by technology

The technical problem addressed in this patents relates to improving thermographic cameras' ability to capture fine detail while also being able to operate at higher temperatures than current designs without sacrificing their performance or requiring expensive coolers.

Method used

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  • Refrigeration type microscopic thermal imaging device and method with optical flat plate micro scanner
  • Refrigeration type microscopic thermal imaging device and method with optical flat plate micro scanner
  • Refrigeration type microscopic thermal imaging device and method with optical flat plate micro scanner

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Embodiment Construction

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0035]The purpose of the present invention is to provide a cooling type micro-thermal imaging device with an optical flat-panel micro-scanner to meet the needs of high-resolution micro-thermal analysis in the fields of semiconductor, biomedicine, MEMS and scientific research. The flat plate rotates to achieve micro-scanning, which reduces frequency confusion and improves the resolution of the system without affecting the thermal sensitivity of the system. At t...

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Abstract

The invention discloses a refrigeration type microscopic thermal imaging device and a method with an optical flat plate micro scanner. The microscopic thermal imaging device comprises a refrigerationfocal plane detector, an infrared microscopic objective lens, an infrared optical flat plate, an optical flat plate support and an automatic rotating platform; the infrared microscopic objective lensis positioned below the automatic rotating platform; the optical flat plate support is fixed on the automatic rotating platform, and the optical axis of the infrared optical flat plate and the opticalaxis of the infrared microscopic objective lens keep an inclination angle theta and are fixed on the optical flat plate support. The refrigeration type microscopic thermal imaging device and the method with the optical flat plate micro scanner is obtained by inserting the optical flat plate micro scanner between the infrared microscopic objective lens and the refrigeration focal plane detector; compared with the microscopic thermal imaging device with the same magnification and the same refrigeration focal plane detector, the refrigeration type microscopic thermal imaging device with the optical flat plate micro scanner has higher spatial resolution and temperature resolution.

Description

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Claims

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Application Information

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Owner YANSHAN UNIV
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