Refrigeration type microscopic thermal imaging device and method with optical flat plate micro scanner
A technology of microscopic thermal imaging and optical flat panel, which is applied in the field of infrared thermal imaging, can solve problems such as microthermal analysis of high-resolution images, and achieve the effect of high spatial resolution and temperature resolution
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[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0035]The purpose of the present invention is to provide a cooling type micro-thermal imaging device with an optical flat-panel micro-scanner to meet the needs of high-resolution micro-thermal analysis in the fields of semiconductor, biomedicine, MEMS and scientific research. The flat plate rotates to achieve micro-scanning, which reduces frequency confusion and improves the resolution of the system without affecting the thermal sensitivity of the system. At t...
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