Stopping block for inertial sensor

An inertial sensor and blocking block technology, applied in the MEMS field, can solve problems such as easy adhesion, charge accumulation, and easy damage, and achieve the effects of increasing firmness, reducing the possibility of damage, and increasing the effective contact area

Pending Publication Date: 2019-03-22
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the blocking block structure in the prior art is easy to be damaged when

Method used

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  • Stopping block for inertial sensor
  • Stopping block for inertial sensor

Examples

Experimental program
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Embodiment Construction

[0015] The specific implementation of the blocking block for the inertial sensor provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0016] attached figure 1 Shown is a partial structural schematic diagram of the inertial sensor described in this specific embodiment, including a blocking block 10 , a mass block 11 , and a base 12 . The blocking block 10 includes a body 101 , a covering layer 102 and a conductor 103 .

[0017] attached figure 2 shown is attached figure 1 The state diagram of the structure of the mass block 11 is displaced around the anchor point 14 and is in contact with the blocking block 10 . It can be seen from the figure that the contact position between the body 101 and the mass block 11 is rounded, which can increase the effective contact area between the body 101 and the mass block 11, and reduce the possibility of damage to the blocking block after being hit. sex. Moreover, the surface...

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PUM

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Abstract

The invention provides a stopping block for an inertial sensor. The stopping block is arranged on the surface of a substrate and used for blocking inertial movement of a mass block and comprises a body, wherein the position, in contact with the inertial mass block, of the body is a round corner, and the surface of the body and the surface of the substrate are made of the same material. The surfaceof the stopping block and the surface of the substrate are made of the same material so that the firmness degree of the stopping block can be increased by utilizing the characteristic of tight binding of homogeneous materials and the stopping block is not prone to shedding from the substrate. In addition, the position, in contact with the inertial mass block, of the body is the round corner so that the effective contact area between the stopping block and the mass block can be increased, and the possibility can be reduced that the stopping block is damaged after being bumped.

Description

technical field [0001] The invention relates to the technical field of MEMS, in particular to a blocking block for an inertial sensor. Background technique [0002] The block structure is an important part of IC / MEMS sensor chips, especially inertial devices. However, the blocking block structure in the prior art is easy to be damaged when being impacted or vibrated, easy to generate charge accumulation, and easy to stick. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a blocking block for an inertial sensor, which is not easily damaged when it is impacted or shaken. [0004] In order to solve the above problems, the present invention provides a blocking block for an inertial sensor, which is arranged on a base surface and is used to block the inertial movement of the mass block, including: a body, a position where the body contacts the inertial mass block The corners are rounded, and the body and the surface ...

Claims

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Application Information

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IPC IPC(8): G01D11/16
CPCG01D11/16
Inventor 颜培力裘进
Owner QST CORP
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