A Simple Low Temperature Dewax Cleaning Process for LED Wafers

A chip and simple technology, applied in the field of optoelectronics, can solve the problems of unfavorable production efficiency, lower product cost, cumbersome equipment and wax removal methods, etc., and achieve the effect of improving wax removal and cleaning ability, improving production efficiency, and high quality of wax removal and cleaning

Active Publication Date: 2020-11-27
SHANDONG INSPUR HUAGUANG OPTOELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Chinese patent document CN105070680A discloses a wafer dewaxing equipment and dewaxing method, which requires the use of the frame and the moving track on the upper end, including multiple areas of heating area, waxing area, cleaning area, and rinsing area, and needs to be equipped with hydraulic devices And high temperature treatment, equipment and wax removal methods are more cumbersome, which is not conducive to improving production efficiency and reducing product costs

Method used

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  • A Simple Low Temperature Dewax Cleaning Process for LED Wafers
  • A Simple Low Temperature Dewax Cleaning Process for LED Wafers
  • A Simple Low Temperature Dewax Cleaning Process for LED Wafers

Examples

Experimental program
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Effect test

Embodiment 1

[0037] A simple low-temperature dewaxing and cleaning process for LED wafers, the steps include:

[0038] (1) Take the wafers to be dewaxed and cleaned and put them into the cleaning flower basket in turn;

[0039] (2) Put the flower basket to be cleaned in step (1) into 2 liters of wax-removing solution at a temperature of 45°C for ultrasonic cleaning. During the cleaning process, the flower basket is in a state of vibrating up and down in the wax-removing solution with a vibration frequency of 15 times / min. The frequency is 24KHz, and the cleaning time is 15 minutes;

[0040] (3) Place the flower basket after ultrasonic cleaning in step (2) in room temperature acetone solution with a purity of 99.5% for 10 minutes;

[0041] (4) Place the flower basket cleaned in step (3) in room temperature ethanol solution with a purity of 99.7% for 3 minutes;

[0042] (5) Dry the flower basket cleaned in step (4) with hot nitrogen at a drying temperature of 38°C and a drying time of 9 mi...

Embodiment 2

[0045] A simple low-temperature dewaxing and cleaning process for LED wafers, the steps are as follows:

[0046] (1) Put the wafers to be dewaxed and cleaned into the cleaning flower basket in turn;

[0047] (2) Put the flower basket cleaned in step (1) into 2 liters of wax-removing solution at a temperature of 40°C for ultrasonic cleaning. During the cleaning process, the flower basket is in a state of vibration up and down in the wax-removing solution. The vibration frequency is 27 times per minute, and the ultrasonic frequency 32KHz, cleaning time 10min;

[0048] (3) Place the flower basket after ultrasonic cleaning in step (2) in room temperature acetone solution with a purity of 99.5% for 7 minutes;

[0049] (4) Place the flower basket cleaned in step (3) in room temperature isopropanol solution with a purity of 99.7% for 2 minutes;

[0050] (5) Dry the flower basket cleaned in step (4) with hot nitrogen at a drying temperature of 51°C for 6 minutes.

[0051] Take out th...

Embodiment 3

[0053] A simple low-temperature dewaxing and cleaning process for LED wafers, the steps are as follows:

[0054] (1) Put the wafers to be dewaxed and cleaned into the cleaning flower basket in turn;

[0055] (2) Put the flower basket cleaned in step (1) into 2 liters of wax-removing solution at a temperature of 50°C for ultrasonic cleaning. During the cleaning process, the flower basket is in a state of vibration up and down in the wax-removing solution. 38KHz, cleaning time 5min;

[0056] (3) Place the flower basket after ultrasonic cleaning in step (2) in room temperature acetone solution with a purity of 99.5% for 4 minutes;

[0057] (4) Place the flower basket cleaned in step (3) in room temperature ethanol solution with a purity of 99.7% for 1 min;

[0058] (5) Dry the flower basket cleaned in step (4) with hot nitrogen at a drying temperature of 75°C for 3 minutes.

[0059] After cleaning, there is no residual wax or reagent imprint on the surface of the wafer, and th...

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PUM

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Abstract

The invention relates to a simple low-temperature wax-removal cleaning process for LED wafers, comprising: placing a flower basket containing wafers to be cleaned in a heated wax-removing solution for ultrasonic cleaning, and the flower basket vibrates up and down in the wax-removing solution at a rate of 15-35 times per minute , then wash with acetone at room temperature, wash with ethanol or isopropanol at room temperature, and dry with hot nitrogen. The surface of the wafer treated by the method of the invention has no surface abnormalities such as residual wax and reagent imprints, which ensures the cleaning quality of the wafer surface. At the same time, the method of the invention has low heating temperature, simple cleaning steps, easy operation, low energy consumption and raw material consumption, and improves production efficiency. It also reduces product cost.

Description

technical field [0001] The invention relates to a simple low-temperature dewaxing and cleaning process for LED wafers, belonging to the field of optoelectronic technology. Background technique [0002] Light-emitting diode (LED), as a new type of cold light source with energy saving, environmental protection, safety, long service life, small size, high brightness, fast response time and good stability, has received extensive attention and in-depth attention from experts and scholars at home and abroad since its inception. Research, since Shuji Nakamura first invented the blue LED, through continuous innovation and development of science and technology, the industrial production of multi-color LEDs such as red, green, white, yellow, orange and two-color has been realized, which are widely used in outdoor display screens, Landscape lighting, decoration, lighting, traffic instructions and many other fields have gradually entered thousands of households. Compared with tradition...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/02H01L33/00
CPCH01L21/02052H01L33/005
Inventor 胡夕伦闫宝华刘琦徐现刚肖成峰
Owner SHANDONG INSPUR HUAGUANG OPTOELECTRONICS
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