Precision compensation method for three-freedom-degree target device used for laser tracker
A laser tracker and precision compensation technology, applied in the field of precision compensation, can solve problems such as errors, achieve the effects of low cost, simple operation, and guaranteed measurement accuracy
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[0041] The present invention will be further explained in detail below in conjunction with the accompanying drawings and specific embodiments, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.
[0042] see figure 1 , figure 2 As shown, the present invention is a three-degree-of-freedom target device 14, which is applied to the end position measurement of an industrial robot 13. The three-degree-of-freedom target device 14 mainly includes an X-axis motor 1, a Y-axis motor 3, a Z-axis motor 6, and an inertial measurement unit 5 , target ball 7; the motor shafts of X-axis motor 1, Y-axis motor 3 and Z-axis motor 6 are set along the X-axis, Y-axis and Z-axis respectively, and the extension lines of the three motor shafts intersect at the center of the target ball during setting , the inertial measurement unit 5 is used to measure the pose of the robot tool coordinate system.
[0043] The X-axis motor is co...
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