Method for detecting bending performance of material
A bending performance and detection method technology, applied in the direction of analyzing materials, using stable bending force to test the strength of materials, measuring devices, etc., can solve the problems of limited application range and high cost, and achieve the effect of wide application range and low cost
Active Publication Date: 2019-05-28
TSINGHUA UNIV
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Problems solved by technology
In related technologies, the method of bending experiments on materials at different temperatures at the micron and nanometer levels has problems such as high cost and limited scope of application.
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[0033] Various exemplary embodiments, features, and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. The same reference numbers in the figures indicate functionally identical or similar elements. While various aspects of the embodiments are shown in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
[0034] The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration." Any embodiment described herein as "exemplary" is not necessarily to be construed as superior or better than other embodiments.
[0035] In addition, in order to better illustrate the present disclosure, numerous specific details are given in the following specific implementation manners. It will be understood by those skilled in the art that the present disclosure may be practiced without some of the specific details. In some instances, methods, means, componen...
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Abstract
The invention relates to a method for detecting bending performance of a material. The method comprises the following steps of: generating a material film to be tested with a target thickness on a support layer to obtain a part to be tested; etching the support layer to obtain a support seat, wherein the support seat is used for supporting the part to be tested at one end or two ends of the part to be tested; in a preset detection environment, applying a load to a position to be tested of the part to be tested; and determining the bending modulus of the part to be tested according to the loadand displacement change of the position to be tested. The target width is 1-10mm, the target thickness is 100-5000nm, and the length of the part to be measured, which is not covered by the support seat, is 0.1 -2mm. According to the method for detecting the bending performance of the material, bending tests can be carried out on the part to be tested with the size of micron magnitude and nano magnitude to obtain the bending modulus of the piece to be test, and the method has the advantages of wide application range and low cost.
Description
technical field [0001] The present disclosure relates to the field of material detection, and in particular to a detection method of material bending performance. Background technique [0002] Micro-Electro-Mechanical-Systems (MEMS) refers to a controllable and movable micro-electromechanical device with a size below the millimeter level and a constituent unit size of the micron or nanometer level. A system that integrates the functions of sensors, micro-actuators, and signal processing and control. With the development of MEMS, a large number of devices with small size, light weight, low power consumption, high reliability and high sensitivity have been produced, and are widely used in automotive electronics, computers, consumer electronics, aerospace, machinery, Chemical, pharmaceutical and other fields. When the device is working, due to problems such as heat generation, external load or thermal mismatch, the components of the device will have problems such as bending. ...
Claims
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IPC IPC(8): G01N3/20G01N1/28G01N3/04
Inventor 冯雪李燕方旭飞
Owner TSINGHUA UNIV