A large field of view galvanometer coaxial visual imaging device and method

Abstract

A large field of view galvanometer coaxial visual imaging device and method, the device includes a light source, a field mirror, a galvanometer system, an aperture component, a beam splitter, a camera lens, an image sensor and a laser component, and the light source is used to irradiate the The surface of the workpiece, the beam of the imaging system reflected on the surface of the workpiece enters the camera lens through the field mirror, the vibrating mirror system, the diaphragm part and the beam splitter in turn, and is received by the image sensor; the laser beam emitted by the laser component passes through the beam splitter and the diaphragm part in turn , the galvanometer system, and the field mirror irradiate the surface of the workpiece to be processed. The invention can greatly improve the coaxial vision of the vibrating mirror. In laser processing, the coaxial vision of the vibrating mirror is directly used to complete the visual positioning function of large samples, and overcomes the positioning deviation caused by the temperature drift of the vibrating mirror system in the laser processing system.

Description

technical field [0001] The invention relates to the field of vibrating mirror coaxial visual imaging, and specifically relates to a large field of view vibrating mirror coaxial visual imaging device and method. Background technique [0002] Laser processing has been widely used in modern manufacturing, especially in the fields of precision processing and micro-processing, including cutting, marking, printing, drilling, engraving, scanning, etc. Flexible adaptability, intelligence and efficiency requirements are getting higher and higher, so laser processing systems with visual positioning and detection are becoming more and more popular. Laser processing systems with visual positioning generally have two methods, one is paraxial vision , the machine vision imaging lens is placed on the side of the laser processing head, and the vision system and the laser processing system are independent of each other; the other is the coaxial vision, which means that the vision positioning...

AI Technical Summary

Problems solved by technology

However, the visual format of the existing laser coaxial positioning and detection is relatively small. Generally, the maximum compatible image sensor is 1 / 2 inch. The short side of the field lens image sensor with the F170 has a visual format of about 12mm, and it is impossible to shoot large samples at one time. , the visual positioning function cannot be completed. An existing method is to use two visual systems, the system with a small visual format for position compensation, and the system with a large visual format for positioning (citing patents: CN105598579A, 20160525, visual positioning based on two coaxial laser processing device and method), on the one hand, this solution increases the cost and cumbersome debugging, on the other hand, the stability and cooperation between the system and the two image sensors are very high, and it is not flexible and convenient to use.

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