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A continuous response hydrogen array gas sensor and its preparation method

A technology for serializing gas and sensors, applied in the field of hydrogen sensors

Active Publication Date: 2021-09-24
ZAOZHUANG UNIV
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  • Abstract
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Problems solved by technology

[0004] The invention provides a continuous response hydrogen array gas sensor and its preparation method, which are used to solve the problems of sensitivity, measurement range, continuity and practicability of current hydrogen sensors

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  • A continuous response hydrogen array gas sensor and its preparation method
  • A continuous response hydrogen array gas sensor and its preparation method

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Embodiment Construction

[0022] For ease of understanding, the continuous-response hydrogen arrayed gas sensor will be described below in conjunction with examples. It should be understood that these examples are only for illustrating the present invention and are not intended to limit the scope of the present invention.

[0023] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation and positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, or in a specific orientation. construction and operation, therefore, should not be construed as limiting the invention. In addition, the terms "first", "second", and "thir...

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Abstract

The invention belongs to the technical field of hydrogen sensors, and in particular relates to a continuous response hydrogen array gas sensor and a preparation method thereof. The continuous response hydrogen arrayed gas sensor includes a substrate and a Pd material nano-slit electrode layer arranged on the substrate, and the Pd material nano-slit electrode layer includes several strips of Pd material strips arranged in sequence and plated on the outermost side. For electrodes of Pd material strips, the gap width between adjacent Pd material strips changes continuously from one end to the other. In the technical solution provided by the present invention, the minimum hydrogen detection concentration is determined by the minimum spacing of the wedge-shaped gaps, and the slope of the wedge-shaped gaps controls the speed at which the resistance of the sensor decreases, that is, the response sensitivity, and the strength of the detection signal can be adjusted by the number of array stripes. Experiments show that the detection limit of the sensor to hydrogen can be lower than 1ppm, and its resistance value responds linearly with the concentration of hydrogen.

Description

technical field [0001] The invention belongs to the technical field of hydrogen sensors, and in particular relates to a continuous response hydrogen array gas sensor and a preparation method thereof. Background technique [0002] Hydrogen sensors can be divided into two types: optical type and electrical characteristic type. Among them, the optical hydrogen sensor uses the change of the optical properties of the hydrogenated material film after absorbing hydrogen to realize the detection of hydrogen. This type of sensor has the advantages of strong safety and high sensitivity, but the disadvantages are that the test system is complex, the response is slow, the operation is difficult to control, and the service life is short. The detection principle of the electrical characteristic type hydrogen sensor is to express the catalytic reaction state of hydrogen on the electrode in the form of electrical signals, so as to obtain the integral fraction of hydrogen gas. The electric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
Inventor 高炬
Owner ZAOZHUANG UNIV
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