Room temperature hydrogen sensor based on palladium-nanometer-scale stannic oxide film type electrode

Abstract

The invention relates to a micro hydrogen sensor, in particular to preparation and performance detection of a palladium-nanometer-scale stannic oxide film type electrode in a hydrogen sensor. In the micro hydrogen sensor, aluminum oxide is used as a substrate, and palladium and nanometer-scale stannic oxide deposit on the substrate as a hydrogen sensitive material by adopting a method of electrode-free electrolysis. The invention provides a preparation method of the palladium-nanometer-scale stannic oxide film type electrode, the palladium-nanometer-scale stannic oxide film type electrode better enhance the performance of the hydrogen sensor as the hydrogen sensitive material, development and application of a nanometer-scale stannic oxide material are beneficial to enhancing the performance of the stannic oxide hydrogen sensor, and stannic oxide is doped into noble metals such as the palladium and the like to enhance the flexibility, reduce the response time and also lower the operation temperature. The invention has the advantages of shorter response time, better stability, better repeatability, micro sensor size, low processing cost and being beneficial to minaturization, integration and industrialization, is particularly suitable for room temperature detection and can also recycle ceramic wafers of a substrate carrier.

Description

technical field [0001] The invention relates to a miniature hydrogen sensor, in particular to the preparation and performance detection of a palladium-nanometer tin dioxide film electrode in the hydrogen sensor. technical background [0002] Hydrogen is an ideal new energy source, which is favored by people and widely used in various industrial and agricultural occasions. However, hydrogen is also a flammable and explosive gas, and it is easy to explode when mixed with air. Therefore, the research on hydrogen sensors is imminent. The hydrogen sensor is mainly used in the detection of hydrogen concentration, the separation of mixed gas and the detection of hydrogen leaks in gas filtration. [0003] At present, there are many studies on hydrogen-sensitive materials, such as tin dioxide and metal palladium. Tin dioxide is an important semiconductor-type hydrogen-sensing material, but it lacks gas selectivity and requires high operating temperature (250-600 °C) to obtain suffic...

AI Technical Summary

Problems solved by technology

SnO2 is an important semiconductor-type hydrogen-sensing material, but it lacks gas selectivity and requires high operating temperature (250-600°C) for sufficient sensitivity

Metal palladium has attracted much attention because of its reversible reaction with hydrogen. However, due to the strong adsorption capacity of pure palladium film for hydrogen, especially when the concentration of hydrogen is high, it will lose the sensing performance of hydrogen; and the palladium film is prone to hydrogen embrittlement. Therefore, the research on hydrogen sensitive materials is still going on, and the better performance of hydrogen sensors still needs to be improved and excavated.

Images