The invention particularly provides a high-performance
humidity sensor which comprises n-n homotype
heterojunction materials formed by a stannic
oxide thin film and a
silicon substrate covered with a
silicon-dioxide layer and takes
palladium as a catalytic layer. A preparation method of the resistance-type
humidity sensor comprises the steps that the stannic
oxide thin film is grown on the
silicon substrate covered with
silicon dioxide through a
sputtering method firstly; then the
palladium catalytic layer with the area smaller than the stannic
oxide film is prepared on the surface of the thin film through a
mask film and the
sputtering method. According to the resistance-type
humidity sensor based on the Pd / SnO2 / Si
heterojunction and the preparation method thereof, the Pd / SnO2 / Si
heterojunction humidity sensor is prepared by means of the
catalytic effect of the
palladium film and the amplification effect of the stannic oxide-
silicon heterojunction, the technology is simple, the cost is low, a heater is not needed, the humidity sensor can work at the
room temperature, the humidity sensor has the advantages of being low in
energy consumption, high in sensitivity and short in response and
recovery time, the good detection property to
water vapor is achieved, and important application prospect is achieved.