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Spaying method for large-area double-sided and fluorine-doped tin oxide transparent conductive film

A technology of fluorine-doped tin oxide and transparent conductive film, which is applied in the spraying field of large-area double-sided fluorine-doped tin oxide transparent conductive film, can solve problems such as film formation on one side only, and achieve the effect of widening the application field

Inactive Publication Date: 2012-03-14
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a large-area double-sided fluorine-doped tin oxide transparent conductive film spraying method, which solves the defect that only one side of the film can be formed in the prior art, and reduces the pollution of the film surface

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Cut the glass substrate into 600×600×5 mm 3 Then the cut glass substrate is edged, and then the glass substrate is cleaned and dried; then the glass substrate is placed vertically on the glass support, and the glass support is vertically installed on the trolley, which is driven by the trolley Enter the heating chamber at a speed of 400mm / s for heating; after the glass substrate is heated to 400 °C, fix the spray gun in the spray chamber and keep the gun shaft perpendicular to the surface of the glass substrate, open the gas-liquid valve of the spray gun, and spray fluorine into the spray chamber Dope the tin oxide precursor solution, keep the exhaust fan closed, adjust the distance between the nozzle and the glass surface to 300 mm, open the gas-liquid valve, and adjust the gas pressure to 3×10 5 Pa, the flow rate is 20 L / min, and the liquid pressure of the fluorine-doped tin oxide solution is 1×10 5 Pa, the flow rate is 2.5 L / h, the carrier gas for spraying is high-p...

Embodiment 2

[0035] Cut the glass substrate into 490×460×8 mm 3Then the cut glass substrate is edged, and then the glass substrate is cleaned and dried; then the glass substrate is placed vertically on the glass support, and the glass support is vertically installed on the trolley, which is driven by the trolley Enter the heating chamber at a speed of 800mm / s for heating; after the glass substrate is heated to 550 °C, fix the spray gun in the spray chamber and keep the gun shaft perpendicular to the surface of the glass substrate, open the gas-liquid valve of the spray gun, and spray fluorine into the spray chamber Dope the tin oxide precursor solution, turn on the exhaust fan at the same time, and control the exhaust flow to control the exhaust flow at 100 m 3 / h, adjust the distance between the nozzle and the surface of the glass to 500 mm, open the gas-liquid valve, and adjust the gas pressure to 7 × 10 5 Pa, the flow rate is 60 L / min, and the liquid pressure of the fluorine-doped tin ...

Embodiment 3

[0038] Cut the glass substrate into 600×1200×5 mm 3 Then the cut glass substrate is edged, and then the glass substrate is cleaned and dried; then the glass substrate is placed vertically on the glass support, and the glass support is vertically installed on the trolley, which is driven by the trolley Enter the heating chamber at a speed of 600mm / s for heating; after the glass substrate is heated to 490 °C, fix the spray gun in the spray chamber and keep the gun shaft perpendicular to the surface of the glass substrate, open the gas-liquid valve of the spray gun, and spray fluorine into the spray chamber Dope the tin oxide precursor solution, turn on the exhaust fan at the same time, and control the exhaust flow to control the exhaust flow at 30 m 3 / h, adjust the distance between the nozzle and the surface of the glass to 400 mm, open the gas-liquid valve, and adjust the gas pressure to 5 × 10 5 Pa, the flow rate is 40 L / min, and the liquid pressure of the fluorine-doped tin...

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Abstract

The invention discloses a spraying method for a large-area double-sided and fluorine-doped tin oxide transparent conductive film. In the spraying method, a large amount of fog drops containing a fluorine-doped tin oxide precursor spraying liquid are sprayed into a coating chamber by adopting a spraying pyrolysis preparation technology; the fog drops are driven by an exhaust fan to regularly and directionally move; under the action of high temperature, the fog drops are subjected to solvent volatilization, a thermal decompose reaction of solute and the like and then uniformly form nucleuses and grow on the front side and the back side of a vertically-arranged glass matrix to form the fluorine-doped tin oxide film; residual waste gas is exhausted from an exhaust system; and finally, the prepared double-sided and fluorine-doped tin oxide film is cooled under strong wind to finish the preparation process of the film. The double-sided and fluorine-doped tin oxide film prepared by the method has the advantages of low cost, small pollution to a film surface, high transmissivity of visible light and infrared reflectivity and favorable conduction performance; meanwhile, since the spraying pyrolysis preparation technology is adopted, the process is simple and feasible, the preparation efficiency of the film is high and the film can be prepared in double sides and a large area.

Description

technical field [0001] The invention belongs to the technical field of thin film preparation, and relates to a spray coating method of a large-area double-sided fluorine-doped tin oxide transparent conductive thin film. Background technique [0002] Fluorine-doped tin oxide film is a transparent nano-scale film with good conductivity, and its resistivity is generally in the range of 10 -4 Ω·cm order, due to its high carrier concentration, the reflectivity of the film to infrared light is high, and this type of material is sensitive to atmospheres such as carbon monoxide, and has good gas-sensing performance, so the film can be used as Transparent electrodes, electrothermal films, low-e glass, gas sensors, etc. [0003] The existing fluorine-doped tin oxide conductive glass is generally coated on one side, and the conductive glass coated on both sides can not only improve the thermal insulation performance of low-emissivity glass, but also broaden the performance of semicon...

Claims

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Application Information

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IPC IPC(8): C03C17/22
Inventor 赵高扬任洋
Owner XIAN UNIV OF TECH
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