The invention relates to the technical field of photovoltaic cells, in particular to a back contact
crystalline silicon cell and a preparation method thereof. A back contact
crystalline silicon cell comprises a
silicon substrate layer, a composite layer, a tunneling
oxide layer, a second
passivation layer, a composite doped
silicon layer and a back
electrode layer. A composite layer is arranged on the first surface of the
silicon substrate layer; a tunneling
oxide layer is arranged on the second surface; a second
passivation layer is arranged on the surface of the tunneling
oxide layer; a composite doped silicon layer is arranged on the surface of the second
passivation layer, and the composite doped silicon layer comprises a first
antimony doped layer, a
phosphorus-
antimony doped layer and a second
antimony doped layer which are sequentially stacked in the direction from the silicon substrate layer to the second passivation layer; and a back
electrode layer is arranged on the surface of the composite doped silicon layer. According to the back contact
crystalline silicon cell, the contact resistivity of the back
electrode can be reduced, the service life of a carrier is prolonged, accurate
adaptation of the
doping structure and the BC interdigital electrode is achieved, back side
parasitism is reduced, the preparation process can be simplified, the cost is reduced, and the long-term reliability of the cell and the conversion efficiency of the cell are improved.