Self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effect

A technology of precise motion and interface effect, applied in piezoelectric/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc. problems such as low force, to achieve the effect of stable movement, simple structure and improved friction

Active Publication Date: 2019-06-18
SUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Due to the complex structure and large size of the existing piezoelectric ceramic precision drive device, it cannot meet the needs of stick-slip drive of equipment in a small space. The friction provided by the general small platform is low and cannot meet the actual needs. Provide a stick-slip driving platform with small volume and high friction

Method used

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  • Self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effect
  • Self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effect
  • Self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effect

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Embodiment Construction

[0027] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] refer to figure 1 , in the above embodiment, the working principle of the inertia block in the self-adsorption inertial stick-slip cross-scale precision motion platform based on the interface effect is as follows figure 1 shown

[0029] (1) The first stage: when there is no driving voltage to excite the piezoelectric ceramics, the states of the inertial block 11 and the moving block 2 remain unchanged, and the prototype remains unchanged.

[0030] (2) The second stage ①②: When the voltage rises slowly, the piezoelectric ceramic 2 expands as the voltage rises slowly, so that the second flexible flexible hinge 153 bends and deforms. The inertial force acts on the i...

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Abstract

The invention relates to a self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effect, and belongs to the field of cross-scale precision motion. The self-adsorption inertial stick-slip cross-scale precision motion platform based on the interface effect is provided with an inertial block, a moving block, a piezoelectric ceramic and a moving surface arrangedat the bottom of the moving block, wherein the moving block is arranged below the inertial block, a micro-nano structure is arranged on the moving surface, the lower end of the moving surface is in contact with a metal surface and generates frictional force, the inertial block is provided with a mounting surface, an accommodating groove penetrating through the inertial block is arranged on the mounting surface along the center position of the inertial block, the piezoelectric ceramic is placed in the accommodating groove, and a fixed wall and an elastic wall are respectively arranged on the left and right sides of the accommodating groove. The scheme of the invention has the advantages of simple structure, small volume, simple manufacturing process and low manufacturing cost, and can realize cross-scale precision positioning; and in addition, since a magnet is arranged in a cavity, the frictional force of the inertial block and the moving block can be improved, so that the motion of the platform can be more stable.

Description

technical field [0001] The invention relates to a self-adsorption inertial stick-slip cross-scale precision motion platform based on interface effects, belonging to the field of cross-scale precision motion. Background technique [0002] With the rapid development of micro / nano technology, there is an urgent need for sub / micron, micro / Nanoscale ultra-precise drive mechanism. [0003] The cross-scale precision motion technology with micron-level motion resolution and millimeter-level motion travel is the key technology in the field of micro-drives. Compared with other types of cross-scale motion driving methods, inertial stick-slip drive has simple driving principle, convenience, and simple control, and has the advantages of large motion range, high resolution, simple structure, easy miniaturization, and precise positioning. Therefore, inertial stick-slip drive It is a method that is widely used in the current cross-scale driving. The working principle of the inertial sti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00
Inventor 钟博文刘彬王振华孙立宁
Owner SUZHOU UNIV
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